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Near-field optical virtual optic probe

A near-field optics and virtual light technology, applied in the fields of near-field optics and nano-optics, can solve the problem of low optical efficiency of fiber probes

Inactive Publication Date: 2002-09-04
TSINGHUA UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] The purpose of the present invention is to overcome the shortcomings of the existing optical fiber probes such as low light transmission efficiency and the strict spacing control requirements in the SIL system, and propose a near-field optical virtual optical probe and its implementation method

Method used

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Examples

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Embodiment 1

[0026] Embodiment 1 is a near-field optical virtual light probe system using an isosceles right-angled triangular prism, and its principle structure is as follows Figure 10 shown. The system mainly consists of Figure 10The shown isosceles right triangle prism 13 placed in the air 15 is composed of a square aperture stop 14 located at the interface between the prism and the air. The two acute angles θ of the isosceles right triangle prism are both 45 degrees, the length of the hypotenuse is 1cm, and the thickness of the prism is 0.7cm. The prism material is K9 glass with a refractive index n=1.5163. A silver film with a thickness of 100nm is plated on the inclined surface of the prism, and a square hole 16 is opened in the center of the film layer to form a square aperture stop 14 . Its cross section is as Figure 11 As shown, 17 is a metal film, and 18 is a square hole, the length L and width H of which are both 1.5 μm. When the parallel laser beam 12 (wavelength is 690...

Embodiment 2

[0027] Embodiment 2 is a near-field optical virtual light probe system using a hemispherical solid immersion lens, and its principle structure is as follows Figure 12 shown. The system mainly consists of Figure 12 The shown annular diaphragm 21 , focusing objective lens 22 , hemispherical solid immersion lens (SIL) 23 and square aperture diaphragm 24 are composed. The hemispherical solid immersion lens is made of ZF6 glass with a refractive index of 1.8, and its radius is 1mm. A gold film with a thickness of 150nm is coated on the bottom surface of the solid immersion lens, and a square hole 25 is opened in the center of the film layer, which forms a square aperture stop 24 . Its cross section is as Figure 13 As shown, 29 is a metal film, 30 is a square hole, the length L and width H of which are both 1.5 μm. The annular diaphragm 21 is placed in front of the focusing objective lens, and the circular light blocking part 20 in its center is located at the center of the l...

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Abstract

The present invention relates to a near field optical virtual probe, and is characterized by that a small-hole diaphragm is set at interface place of two media with different refractivities so as to make the evanscent field interferences produced when the incident beam whose in incident angle is greater than critical angle produces total reflection overlap to form constrained optical field, and the central peak of said constrained optical field can be formed into near field optical virtual probe. Its light-flux efficiency is high, and is 10 to the power 2-10 to the power 4 times that of general nano aperture optical fibre probe, and the half-peak value width of middle pek of its optical field distribution (i.e. size is virtual optical probe) can be basically retained and unchanged in the wavelength depth space range. It can be used in near-field optical spectral detectino, near-field optical storage, nano p hotoetching and near-field optical operation, etc.

Description

technical field [0001] The invention belongs to the technical fields of near-field optics and nano-optics, and in particular relates to the interference and superposition of evanescent fields to form a constrained light field and the design of nanoscale near-field optical virtual light probes. Background technique [0002] Obtaining nanoscale light sources is one of the key technologies in near-field optical imaging, detection, nanolithography and near-field optical storage systems. Metal-coated fiber optic probes with nano-apertures have been widely used in the past ten years, but the light transmission efficiency of fiber optic probes is very low, usually 10 -4 ~10 -5 . Later, in the fields of near-field optical imaging and near-field optical storage, the use of a solid immersion lens (Solid Immersion Lens, SIL) greatly improves light transmission efficiency. However, this method has a common disadvantage with the fiber probe, which is that the distance between the bott...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B21/00G02B27/00G02B27/09G02B27/60
Inventor 王佳洪涛孙利群许吉英田芊
Owner TSINGHUA UNIV
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