Ink jet for piezoelectric ink jetting head and its making process

Abstract

THe ink jet includes ink cavity, lower driving electrode, piezoelectric element and upper driving electrode, and its ink cavity includes vibrating metal layer and jet hole sheet. The making process includes the steps of: providing one substrate with top side and bottom side; forming one vibrating metal layer on the top; forming several ink cavities to expose partial vibrating metal layer and forming piezoelectric vibrating element with upper and lower electrodes one the vibrating metal layer. The substrate for etching may be silicon chip, ceramic sheet or metal sheet. The vibrating metal layer is formed with Ni, Cu, Pt or other metal via electric casting process, physical vapor deposition process or chemical vapor deposition process.

Description

technical field [0001] The present invention relates to an inkjet device of a piezoelectric inkjet head and a manufacturing method thereof, and in particular to a piezoelectric inkjet head that can be formed by etching a silicon wafer, ceramics, or metal as a substrate (Substrate) An inkjet device with an ink chamber and a manufacturing method thereof. Background technique [0002] In recent years, driven by the high-tech industry, all electronics-related industries have flourished. Take printers as an example. In just a few years, printing technology has progressed from strike pin type and black and white laser to color inkjet and color laser. It can be described as a rapid progress. Most of the inkjet printers currently on the market use thermal bubble or piezoelectric inkjet heads to spread ink onto paper to complete printing. The bubble type uses a heater to vaporize the ink instantly, and generates high-pressure bubbles to push the ink out of the nozzle. The piezoele...

AI Technical Summary

Problems solved by technology

(2) The piezoelectric material has a fast response speed, which can increase the printing speed; the thermal foam type is limited by the heating and cooling speed, so the printing speed of the nozzle is limited

(3) The piezoelectric inkjet head can control the droplet size by controlling the vibration of the piezoelectric vibrating plate to improve the printing quality; the thermal bubble type can only control whether the spray point is sprayed or not, and it is difficult to control the ink droplet size

This inward pulling force will affect the force that originally intended to squeeze the ink to be ejected from the lower nozzle hole, as shown by the arrow E, and reduce the ink expelling efficiency of the ink from the nozzle hole

Moreover, since the ink is interconnected between the ink chambers, the pulling force of the side wall of the ink chamber 106 will cause the disturbance of the ink in the adjacent inkjet chamber. This phenomenon is called cross talk, especially when adjacent The turbulence effect is especially prone to occur when the ink chamber of the

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