Ink jet for piezoelectric ink jetting head and its making process
The technology of an inkjet device and manufacturing method, which is applied in printing and other directions, can solve the problems of reducing ink efficiency, ink disturbance, and limitation, and achieve the effects of avoiding inaccurate pressing alignment, shortening process time, and short process time
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[0024] The technical feature of the present invention is that an ink cavity is defined on a substrate, and a metal sheet is used as the vibration layer of the piezoelectric inkjet head. The material of the base material may be a silicon wafer, a ceramic substrate, or a metal sheet. The metal sheet is formed on the substrate by electroforming, physical vapor deposition (Physical Vapor Deposition, PVD), or chemical vapor deposition (Chemical Vapor Deposition, CVD) to form a metal vibration layer.
[0025] In this preferred embodiment, a silicon wafer is used as the base material to illustrate the manufacturing process of the piezoelectric inkjet head of the present invention, but the present invention is not limited thereby.
[0026] Please refer to Figures 2A-2F , which represents a part of the manufacturing process of the ink jet device of the piezoelectric ink jet head according to a preferred embodiment of the present invention. First, a silicon wafer 202 is provided as a...
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