Gray mask defect checking method

A technology of gray-tone mask and defect inspection, which is applied in the field of defect inspection of gray-tone masks, and can solve problems such as indistinct gray-tone graphics, decreased light transmittance of subtle light-transmitting parts, and easy damage to glass substrates.
CN1536440AActive Publication Date: 2004-10-13HOYA CORP
1 Cites 3 Cited by

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
HOYA CORP
Publication Date
2004-10-13

Smart Images

  • Figure 1
    Figure 1
  • Figure 2
    Figure 2
  • Figure 3
    Figure 3
Patent Text Reader

Abstract

PURPOSE: A method for inspecting defects of a gray tone mask is provided to determine whether a gray tone part has defects or not in exposure and transfer precisely with high accuracy. CONSTITUTION: A method for inspecting defects of a gray tone mask includes the steps of composing image data of a gray tone part, carrying out image processing on the basis of the image data for distinguishing defects of the gray tone part, and carrying out the defect inspection of the gray tone part on the basis of the data after the image processing. The image processing is to be fading or highlighting. The gray tone part is an area formed with a light shield pattern below a resolution threshold of an exposure using the gray tone mask and the defect inspection is carried out on the basis of an allowance range of shading of color preset for the data after the image processing.
Need to check novelty before this filing date? Find Prior Art

Description

technical field

[0001] The present invention relates to a device having a gray-tone portion having an adjusted light transmittance area for selectively changing the film thickness of a photoresist film by reducing the light transmittance of the area. A defect inspection (judgment) method, a defect correction method, etc. of a gray tone portion of a gray tone mask. Background technique

[0002] In recent years, in the field of masks for large LCDs, an attempt has been made to reduce the number of masks using a gray tone mask (Non-Patent Document 1).

[0003] Here, a gray tone mask such as Figure 5 As shown in (1), a light-shielding portion 1 , a light-transmitting portion 2 , and a gray tone portion 3 are provided on a transparent substrate. The gray tone portion 3 is, for example, an area where a light-shielding pattern 3a below the limit resolution limit resolution of a large-scale LCD exposure machine using a gray tone mask is formed, and the amount of light transmitted ...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More