Array type micro-electromechanic capacitor microphone
A technology of capacitive microphones and micro-electromechanical capacitors, applied in electrical components, transducer circuits, electrostatic transducer microphones, etc., can solve problems such as the difficulty of integrating capacitive microphones
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[0043] Before explaining the technical details of the present invention in detail, it should be specifically stated that, for the sake of clarity, the following are all described with actual manufacturing processes, as well as various explanatory figures, units, materials, etc., but familiar sound energy, electrical energy, mechanical energy Theories and mutual conversion relations, micro-electro-mechanical system technology process, and microphone technicians can easily know that the present invention is not limited by the description of the actual process, and the numbers, unit materials, etc. The practical application of the present invention.
[0044] Such as figure 1 , as shown in FIG. 2 , an array microelectromechanical condenser microphone 1 of the present invention includes a base 11 , a condenser microphone device 2 , an analog computing device 4 , and a field effect transistor (FieldEmission Transistor; FET) 100 .
[0045] The base 11 defines an accommodating space ...
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