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Polymerized material baroceptor chip

An air pressure sensor and polymer material technology, applied in the sensing field, can solve the problems of complex manufacturing process, high cost and high precision, and achieve the effects of simple manufacturing process, good consistency and low power consumption

Inactive Publication Date: 2005-05-18
INST OF ELECTRONICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The disadvantage of the air pressure box sensor is that it is large in size and difficult to meet the requirements of miniaturization and integration
Silicon pressure sensors are small in size and high in precision, but the manufacturing process is complicated and the cost is also high

Method used

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  • Polymerized material baroceptor chip
  • Polymerized material baroceptor chip
  • Polymerized material baroceptor chip

Examples

Experimental program
Comparison scheme
Effect test

Embodiment

[0050] This example is on a 3×3mm 2 On the glass substrate 1, the solidified polymer cavity wall constitutes the box body 2, which is 1.5×1.5mm 2 Square shape, middle polymer film 3 thickness 20μm, also 1×1mm 2square. Between the substrate 1 and the polymer film 3 is a cavity 7, the height of the microcavity chamber is 5 μm, and the cavity 7 is sealed with air at a certain pressure. There is a flat lower electrode 8 on the upper surface of the middle part of the substrate 1, and a flat upper electrode 9 is arranged on the lower surface of the middle part of the polymer film 3. The upper electrode 9 and the lower electrode 8 face each other up and down, and each has a lead wire. After the two lead wires are extended from the upper right corner and the lower side of the box body 2, they are connected to the upper pad 5 and the lower pad 6 respectively. The upper pad 5 and the lower pad 6 are for the convenience of welding lead wires. An air capacitor is formed between the up...

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Abstract

The present invention relates to sensing technology, and especially the structure and making process of baroceptor chip of polymer material. The baroceptor chip has polymer material as pressure sensing film, and plate electrodes and leads made on substrate of glass, silicon, etc. The pressure sensing film of SU-8 glue, polyimide or other polymer material and the plate electrodes below the film form one capacitor with air in certain pressure sealed inside. When there is some difference between the outer pressure and the sealed air, the film will produce some deformation to cause the capacitance between two electrodes to vary and the capacitance is measured to reach the aim of measuring pressure.

Description

technical field [0001] The invention relates to the field of sensing technology, in particular to a structure and a manufacturing method of an air pressure sensor chip made of polymer materials. Background technique [0002] Air pressure sensor is one of the important directions of sensor technology application. Air pressure is an important physical quantity in atmospheric monitoring and weather forecasting. Many production areas also need to monitor the pressure of various gases. Usually, air pressure box sensors and silicon pressure sensors are used to measure atmospheric pressure. The disadvantage of the air pressure box sensor is that it is large in size, and it is difficult to meet the requirements of miniaturization and integration. Silicon pressure sensors are small in size and high in precision, but the manufacturing process is complicated and the cost is also high. [0003] Micro-mechanical electronic system (MEMS: micro electronic mechanical system) is a new te...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L9/00
Inventor 赵湛武宇秦宁
Owner INST OF ELECTRONICS CHINESE ACAD OF SCI
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