Method for producing stamper used for producing optical disc and optical disc producing method

Abstract

The method of the present invention includes: an exposing process in which an inorganic resist layer 101 formed on a substrate 100 is irradiated with recording laser light modulated by an information signal corresponding to an information signal of an information concave and convex pattern formed on an optical disc to form an exposed pattern corresponding to the information concave and convex pattern on the optical disc, and after the above process a development process in which development processing is performed on the inorganic resist layer to form a concave and convex pattern corresponding to the information concave and convex pattern of the inorganic resist layer; in the above exposing process, after a trial exposure is performed on a non-recording area of the above resist layer, the exposed portion is irradiated with evaluation laser light and a recording signal characteristic of the above resist layer is evaluated from the reflected light to determine based on the evaluation result an optimum focus position of recording laser light which is later performed; and accordingly the recording signal characteristic (jitter value) of the optical disc is predicted and evaluated in the exposing process from the recording characteristic of the exposed portion on the resist to appropriately adjust an exposure focusing position based on the evaluation result and thus, a master having an appropriate concave and convex pattern and consequently an optical disc having an excellent characteristic can be manufactured.

Description

technical field [0001] The present invention relates to a method of manufacturing a master disc for producing an optical disc and a method of producing an optical disc in which, for example, a stamper is produced by transcription to form an optical disc having a function for tracking, seeking, etc. an optical disc substrate having grooves for addresses, etc., and having convex and concave patterns such as pits for recording data, and more particularly to a method in which good optical discs can be produced by adjusting exposure focus at the time of master disc manufacture master discs and thereby produce optical discs with good characteristics. Background technique [0002] In recent years, optical discs such as DVDs (Digital Versatile Discs) have been widely used as recording media in many fields. [0003] Such an optical disc has a structure in which minute information concave or convex patterns (such as grooves for realizing various information signals such as address si...

AI Technical Summary

Problems solved by technology

Therefore, when product defects are caused by the manufacturing conditions of the exposure process, it takes a long period of time to investigate the cause of the defects. In addition, it takes a lot of time until the correction of the reaction conditions in the manufacturing process, which also hinders increased overall productivity and reduced output

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