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Ultraviolet light source, laser treatment apparatus comprising ultraviolet light source, and exposure apparatus comprising ultraviolet light source

一种紫外光源、紫外光的技术，应用在激光治疗设备和曝光设备领域，能够解决很难减小光纤长度、高峰值功率、激励效率低等问题

Inactive Publication Date: 2006-01-18
NIKON CORP
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Problems solved by technology

However, in double-clad EDFA, the excitation efficiency per unit length is lower than in single-clad EDFA, which feeds excitation light directly into the core
For this reason, it is difficult to reduce the length of the fiber in double-clad EDFA, so there is a problem of increased loss of signal light caused by nonlinear effects such as parameter processing or stimulated Raman scattering occurring in the fiber
As a result, double-clad EDFAs cannot achieve as high a peak power as single-clad EDFAs

Method used

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  • Ultraviolet light source, laser treatment apparatus comprising ultraviolet light source, and exposure apparatus comprising ultraviolet light source
  • Ultraviolet light source, laser treatment apparatus comprising ultraviolet light source, and exposure apparatus comprising ultraviolet light source
  • Ultraviolet light source, laser treatment apparatus comprising ultraviolet light source, and exposure apparatus comprising ultraviolet light source

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Embodiment Construction

[0026] Preferred embodiments of the present invention will be described below with reference to the accompanying drawings.

[0027] UV light source

[0028] First, refer to Figure 1~4 Embodiments of the ultraviolet light source according to the present invention are described, wherein each figure represents a part of the ultraviolet light source. The ultraviolet light source 1 comprises: a laser light source 10, which produces signal light in the infrared-visible band; optical amplifier 20, which includes a pre-stage optical fiber amplifier 21 and a rear-stage optical fiber amplifier 22, amplifying the signal light produced by the laser light source 10; and wavelength conversion The optical system 30 converts the signal light amplified by the optical amplifier into ultraviolet light output by wavelength conversion. The ultraviolet light source 1 also includes a single-mode fiber laser as an excitation light source 26 , and the excitation light source 26 is used for the post...

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Abstract

An ultraviolet light source (1) comprises a laser light source (10) for generating a signal light in the infrared region, a optical amplifier (20) which comprises fiber optical amplifiers (21, 22) and amplifies the signal light generated by the laser light source (10), and a wavelength converting optical system (30) which coverts the signal light amplified by the light amplifier (20) into an ultraviolet light and outputs the converted light. The ultraviolet light source (1) uses a single-mode fiber laser (26) as an excitation light source for at least the fiber optical amplifier (22) at one stage of the optical amplifier (20).

Description

technical field [0001] The invention relates to an ultraviolet light source. The ultraviolet light source amplifies signal light in the infrared-visible band through a fiber amplifier, and converts the amplified light into ultraviolet light through a wavelength conversion optical system as an output. The invention also relates to a laser treatment device and an exposure device each comprising a UV light source. Background technique [0002] Today, ultraviolet lasers with short wavelengths and high temporal coherence are used in various fields. For example, ultraviolet lasers are used in exposure equipment in the manufacture of semiconductor devices, and in laser surgical treatment equipment such as surgery, ophthalmology, and dentistry. UV lasers are also used in various measuring instruments and analyzers, as well as processing equipment. The ultraviolet light source used in this apparatus includes a KrF excimer laser with an oscillation wavelength of λ=248 nm and an ArF ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01S3/067H01S3/094H01S3/10A61F9/01G01N21/956G02F1/35G03F7/20H01S3/108H01S3/23H01S3/30
CPCG02F1/353H01S3/302H01S3/067G03F7/70575H01S3/06758G01N2021/95676G01N21/956H01S3/108A61F9/00817G02F2001/354A61F9/00804H01S3/094046H01S3/2375G03F7/70025A61F2009/00872G02F1/354H01S3/10H01S3/094
Inventor 德久章北野博史
Owner NIKON CORP
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