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Method of reilizing electromagnetic wave function appliance based on metal micro nano structure

A technology of functional devices and micro-nano structures, applied in the directions of instruments, optical components, installation, etc., can solve the problems of lack of degrees of freedom, inconcentration of near-field energy of outgoing light, deflection, splitting, and difficulty in focusing, etc.

Inactive Publication Date: 2006-01-25
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

The shortcomings of the method introduced in the above literature are: (1) the energy of the outgoing light is not concentrated in the near field, and the discontinuity in the propagation process limits the application of this phenomenon in devices; (2) the angle as an important propagation characteristic is still lacking The degree of freedom of modulation makes it difficult to realize the functions of electromagnetic waves, such as deflection, light splitting, and focusing

Method used

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  • Method of reilizing electromagnetic wave function appliance based on metal micro nano structure
  • Method of reilizing electromagnetic wave function appliance based on metal micro nano structure
  • Method of reilizing electromagnetic wave function appliance based on metal micro nano structure

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Embodiment 1

[0033] Embodiment 1, through the method of the present invention, the long focal depth of the plane wave and the concentrating effect of the submicron focal spot are realized, and the implementation process is as follows:

[0034](1) In this embodiment, the micro-nano structure needs to be used to realize the long-focus depth and sub-micron focal spot focusing effect of the plane light wave. Since the dielectric function of metal materials has different responses to incident light of different wavelengths, metallic silver Ag is selected as the metal material for the visible light band. slightly less than half a wavelength). According to the long focal depth effect of the element, the phase distribution of the light field exit surface of the element is obtained through the Huygens-Fresnel principle as follows: Figure 10 shown;

[0035] (2) With the optical axis of the micro-nano device as the center, a metal through hole is set, and according to the requirements of surface p...

Embodiment 2

[0039] Embodiment 2 is to realize the long focal depth of the plane wave and the submicron double-beam concentrating effect by the method of the present invention, and its implementation process is as follows:

[0040] (1) In this embodiment, the micro-nano structure needs to be used to realize the long-focus depth of the plane light wave and the sub-micron double-beam focusing effect. Since the dielectric function of metal materials has different responses to incident light of different wavelengths, silver is also selected as the metal material for the visible light band. Firstly, 300nm metallic silver is vapor-deposited on the surface of the quartz substrate, and the phase distribution of the light field on the exit surface is calculated as Figure 11 distributed.

[0041] (2) With the optical axis of the micro-nano device as the center, a plurality of grooves are arranged on both sides or around the through hole. According to the double-beam concentrating effect that need...

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Abstract

The invention is a method for realizing electromagnetic wave functional device based on metal micro-nano structure, firstly according to the requirement of the required functional device for outgoing light field, designing substrate material and metal layer structural parameters, and according to the diffraction theory, finding the phase relation of the surface of the functional device; then using the optical axis of the functional device as a center to arrange metallic through hole, and according to the requirement for surface plasma enhancement, arranging a plurality of grooves or concave holes on two sides of or around the through hole, according to the directional requirement of the outgoing light field, calculating the structural parameters of each groove or concave hole; and finally with the depth trace of the grooves or concave holes as a period, repeating them, thus composing the metal micro-nano structural array functional device. The invention breaks through the restriction of diffraction limit and provides an important means for nano optical and nano electronic researches.

Description

Technical field [0001] The invention relates to a method for modulating input electromagnetic waves by using a metal micro-nano structure to realize various electromagnetic wave (light wave) functional devices (polarization, focusing, and divergence). technical background [0002] The existence of the diffraction limit in traditional optics makes it impossible for people to normally observe and image structures smaller than half the wavelength. Therefore, people have been working on solving the problem of diffraction limit limitation. Recently, T.W Ebbesen et al. found that the light passing through sub-wavelength metal hole arrays can exhibit abnormal transmission enhancement at certain wavelengths (T.W.Ebbesen, Extraordinary optical transmission through sub-wavelength hole arrays. Nature, 391, 667, 1998). Later research showed that if periodic grooves of equal depth are made around individual metal holes or metal slits, the outgoing light can have excellent directionality...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B27/42G02B7/00G02F1/35
Inventor 杜春雷史浩飞罗先刚王长涛董小春高洪涛
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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