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Substrate processing apparatus

A substrate processing device and substrate processing technology, which are applied to storage devices, transportation and packaging, conveyor objects, etc., can solve the problem of inability to perform transportation at the same time, and achieve the effect of shortening the time.

Active Publication Date: 2006-08-16
DAINIPPON SCREEN MTG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, it is almost impossible to carry out the transfer from the storage rack to the opening part and the transfer from the opening part to the storage rack at the same time.

Method used

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Experimental program
Comparison scheme
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no. 1 approach

[0043] 1.1. Configuration of substrate processing equipment

[0044]FIG. 1 is a perspective view showing an overall configuration of a substrate processing apparatus 1 according to an embodiment of the present invention. The substrate processing apparatus 1 is an apparatus that sequentially performs substrate processing in which a group of a plurality of substrates (Lot: lot) stored in a FOUP (frontopening unified pod: front opening unified pod) 80 is taken out from the FOUP, and The plurality of substrates are subjected to etching treatment using a chemical solution such as hydrofluoric acid, rinsing treatment using pure water, and the like. As shown in FIG. 1 , the substrate processing apparatus 1 mainly includes a load port 10 , a loading / unloading unit 100 , and a substrate processing unit 200 . In addition, in FIG. 1 and subsequent drawings, an XYZ rectangular coordinate system is provided in which the Z-axis direction is the vertical direction and the XY plane is the ho...

no. 2 approach

[0111] 2. Second Embodiment

[0112] Next, a second embodiment of the present invention will be described. Compared with the substrate processing apparatus 1 in the first embodiment, the substrate processing apparatus in the second embodiment is the same as the first embodiment except that the loading / unloading unit 500 further includes an orientation unit for orienting the substrate in a predetermined direction. . In addition, in the following description, the same code|symbol is attached|subjected to the same component as the component in the substrate processing apparatus of 1st Embodiment.

[0113] 2.1. Structure of substrate processing equipment

[0114] FIG. 1 is a perspective view showing the overall configuration of a substrate processing apparatus 400 in this embodiment. The substrate processing apparatus 400 is an apparatus that sequentially performs substrate processing in which a group of a plurality of substrates (Lot: lot) stored in a FOUP (frontopening unifie...

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Abstract

The invention provides a substrate processing device capable of transporting a storage device in a storage device accommodating-transporting unit at high efficiency. A transporting manipulator (130a) is used for transporting FOUP (80) among a loading port (10), a third loading section (150) and a show shelf (140), and a transporting manipulator (130b) arranged on the opposite side of the transporting manipulator (130a) over the show shelf (140) is used for transporting the FOUP (80) between the show shelf (140) and a second loading section (160). A mapping treatment and a transportation treatment for transporting a substrate stored in the FOUP (80) to a substrate processing device (200) are carried out in the third loading section (150). Accordingly, a plurality of transportation treatments can be carried out almost at the same time. Additionally, the transporting manipulators (130a, 130b) can execute FOUP(80) transportation treatments without interfering spatially to each other.

Description

technical field [0001] The present invention relates to a substrate processing apparatus for processing semiconductor substrates, glass substrates for liquid crystal display devices, glass substrates for photomasks, substrates for optical disks, etc. Improvements for efficient storage transfer in the placement and transfer unit. Background technique [0002] Conventionally, there is known a substrate processing apparatus having a stocker accommodating / transporting unit for accommodating stockers storing substrates, and for transferring substrates between substrate processing units. Carrying out processing (for example, patent document 1). Here, the substrate processing apparatus of Patent Document 1 has the advantage of reducing the depth of the loader 10 and reducing the floor space. [0003] Patent Document 1: JP Unexamined Publication No. 2002-231785 [0004] However, in the substrate processing apparatus of Patent Document 1, since the transfer robot of the loader is ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/677B65G1/04
Inventor 光吉一郎
Owner DAINIPPON SCREEN MTG CO LTD
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