Method and apparatus for forming surface shape, method and apparatus for forming flying surface shape of magnetic head

Abstract

An apparatus for forming a surface shape includes a resist forming device for forming a resist of a predetermined shape on a predetermined surface of the etching object, and an etching device for performing etching to the predetermined surface of the etching object on which the resist is formed. The resist forming device includes a resist discharging device for forming a resist of a predetermined shape by discharging a resist material to the predetermined surface of the etching object. The appararus can form a surface shape of an etching object in a short time at low cost, and to make the surface shape to be formed highly accurate.

Description

technical field [0001] The invention relates to a method and device for forming a surface shape, in particular to a method and a device for forming a protective layer and forming a surface shape by etching. Background technique [0002] A magnetic disk drive device (HDD) includes a magnetic head in which a magnetic head element portion for reading and writing data to a magnetic disk is formed. Moreover, in the current magnetic disk drive device, with the high density of recorded data, the magnetic head is required to be as close as possible to the surface of the magnetic disk, that is, the requirement for low floating of the magnetic head is getting higher and higher. [0003] In order to achieve low floating, unevenness of a predetermined shape is formed on the flying surface of the magnetic head by using the air flow flowing in when the magnetic disk rotates to generate appropriate heavy pressure. Moreover, in recent years, the shape of the flying surface has become more ...

AI Technical Summary

Problems solved by technology

[0006] Nevertheless, in the method for forming the flying surface of the magnetic head related to the prior art, since the coated protective layer is exposed and developed, it is difficult to form a very complicated shape, so it is difficult to correspond to this year and the future. More and more complex flight surface shapes

[0007] And, when forming each layer, the protective layer of respective coating is independently carried out exposure, developing operation, therefore, have the tendency of increasing the formation process of flying surface, increase magnetic head manufacturing time, and increase manufacturing cost

In addition, exposure and development must be performed each time the protective layer is formed, and it is labor-intensive to match its position, and the accuracy of the shape of the formed flight surface is also reduced, which in turn prolongs the manufacturing time.

[0008] Furthermore, it is necessary to prepare a plurality of reticle lines (masks) with predetermined patterns, thus increasing the manufacturing cost

In addition, in the exposure process, if the protective layer is thicker than the depth of focus of the imaging surface, a sharp end surface of the protective layer cannot be formed after development, and a steep wall angle of the concave-convex portion cannot be formed after etching.

Thus, it is difficult for such a head slider to maintain a stable flying height

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