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Electrostatic chuck mounting and dismounting tool

A technology for electrostatic chucks and removal tools, which is applied in the manufacture of circuits, electrical components, semiconductors/solid-state devices, etc., and can solve the problem of complex positioning between the electrostatic chuck 1 and the base of the electrostatic chuck, excessive contact with the surface of the electrostatic chuck, and maintenance engineers. Advanced problems, to achieve the effect of improving the stability of installation and disassembly, simple structure, and controlling the degree of particle pollution

Active Publication Date: 2006-10-18
BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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AI Technical Summary

Problems solved by technology

[0005] 1. Maintenance engineers have high technical requirements and must undergo strict training;
[0006] 2. During the installation and disassembly process, there is too much contact with the surface of the electrostatic chuck, which is prone to particle pollution;
[0007] 3. During the installation and disassembly process, the positioning of the electrostatic chuck 1 and the electrostatic chuck base is complicated, and repeated installation is prone to particle pollution;

Method used

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  • Electrostatic chuck mounting and dismounting tool
  • Electrostatic chuck mounting and dismounting tool
  • Electrostatic chuck mounting and dismounting tool

Examples

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Embodiment Construction

[0028] see figure 2 with image 3 , the electrostatic chuck installation and removal tool 11 according to the present invention includes a fixed support part and an installation moving part installed on the fixed support part. The fixed support component includes a support plate 5 and a plurality of support rods 4 equidistantly installed on the support plate 5 . The lower end of the support rod 4 is a thread matched with the thread of the protective ring in the reaction chamber 2, and the support rod 4 is first fixed on the protective ring in the reaction chamber 2 during use. The number of support rods 4 is preferably 3 to 6.

[0029] see Figure 4 , the installation moving parts include an electrostatic chuck (ESC) mounting frame 6, and the center of the ESC mounting frame 6 is connected with a rotary handle 3 with a screw 9, and the screw 9 passes through the support plate 5 and is threaded with the support plate 5 connect. When in use, the ESC mounting frame 6 is fix...

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Abstract

The present invention relates to an electrostatic chuck mounting and dismounting tool. It includes a fixed supporting component and a mounting motion component mounted on the fixed supporting component. The described fixed supporting component includes a supporting plate and four supporting bars equidistantly mounted on the supporting plate, and the described mounting motion component includes electrostatic chuck mounting frame, a turnable handle with screw rod is connected in the centre of electrostatic chuck mounting frame, the described screw rod is passed through the supporting plate and connected with said supporting plate by means of screw threads.

Description

technical field [0001] The invention relates to an installation and removal tool in the microelectronic semiconductor industry, in particular to an installation and removal tool for an electrostatic chuck (ESC) in an etching machine (Etch) reaction chamber. Background technique [0002] The equipment in the microelectronics industry is quite sophisticated, especially the structure of the electrostatic chuck (ESC) is extremely complex, and its manufacturing process requires high requirements. In the dry etching process, the electrostatic chuck 1 is located in the center of the reaction chamber 2 of the etching machine, see figure 1 , its role is to clamp the silicon wafer (Wafer) through electrostatic action during the process and precisely control the temperature of the silicon wafer through helium back blowing. As the core component of the etching machine, the electrostatic chuck 1 must be installed and disassembled by a special person using a specific method. [0003] Wi...

Claims

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Application Information

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IPC IPC(8): H01L21/683H01L21/00H01L21/67
Inventor 彭宇霖
Owner BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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