Manil putor automatic silicon-wafer grabbing system and method
A technology of manipulators and silicon wafers, applied in the direction of manipulators, conveyor objects, furnaces, etc., can solve problems such as damage, mass production loss, broken, etc., and achieve the effect of avoiding damage
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Example Embodiment
[0017] Such as figure 2 As shown, a robot automatic silicon wafer pick-and-place system of the present invention includes a silicon wafer box and a manipulator. A light emitter is installed on both sides of the rear end of the silicon wafer portion of the manipulator, and the light emitter may be a separate light emitter. The laser can also be the optical output end of a concentrated laser projection system that is distributed and transmitted through optical fibers. A collimating device corresponding to the light emitter is installed on both sides of the front end of the silicon chip portion of the manipulator. The collimating device is a collimating hole or a collimating slit. Under normal circumstances, the light emitter emits Light can pass through the collimating device. An identification mark is affixed to each groove side of the silicon wafer box, and the identification mark is a diffraction grating array with different codes or a mirror array with different inclination ang...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.
© 2023 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap