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Method of producing film and method of producing ink-jet head

A manufacturing method and inkjet head technology, which are applied in the manufacture/assembly of piezoelectric/electrostrictive devices, pressure inorganic powder coating, printing, etc., can solve the problems of decreased insulation, decreased piezoelectric properties, and film damage. , to avoid defects and damage, avoid the decline of piezoelectric properties, and achieve the effect of good piezoelectric properties

Inactive Publication Date: 2007-02-28
BROTHER KOGYO KK +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] However, according to the experiments of the present inventors, annealing at a high temperature in order to obtain sufficient piezoelectric characteristics may cause defects in the film, and in extreme cases, the film may be destroyed.
If this happens, it will lead to a decrease in insulation, which will lead to a decrease in piezoelectric characteristics, so it is necessary to improve

Method used

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  • Method of producing film and method of producing ink-jet head
  • Method of producing film and method of producing ink-jet head
  • Method of producing film and method of producing ink-jet head

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1-1

[0063] 1. Membrane Formation

[0064] 1) Modulation of ceramic particles

[0065]α-alumina (available from Showa Denko) as a raw material was pulverized with a ball mill to obtain a fine powder of α-alumina having an average particle diameter of about 1 μm and a particle size distribution as shown in FIG. 10 . The particle size distribution was measured with a dry-type particle size distribution analyzer (HELOS & RODOS manufactured by Nippon Laser Laser). This fine powder was placed in a muffle furnace (FP100 manufactured by Yamato Kogyo Co., Ltd.), and the temperature inside the furnace was raised to 600° C. over 1 hour. After keeping at 600° C. for 1 hour, the furnace was cooled by natural cooling, and the fine powder was taken out. Fig. 10 also shows the particle size distribution of α-alumina after heat treatment.

[0066] 2) Film formation

[0067] A stainless steel (SUS430) plate was used as a substrate, and the alumina powder prepared in 1) was used as material part...

Embodiment 1-2

[0073] Except that the film thickness of the insulating film was 1 μm, α-alumina particles were prepared in the same manner as in Example 1-1, a film was formed, and a test was performed.

Embodiment 2-1

[0085] The fine powder of α-alumina pulverized in the same manner as in Example 1-1 was placed in a muffle furnace (FP100 manufactured by Yamato Kogyo Co., Ltd.), and the temperature was raised to 150° C. over 90 minutes. After keeping at 150° C. for 300 minutes, the furnace was cooled by natural cooling, and the fine powder was taken out. Using the processed fine powder as material particles, an insulating film was formed and tested in the same manner as in Example 1-1. However, in the annealing process, the temperature of the muffle furnace was raised to 850° C., and the substrate on which the film was formed was put inside, and held at 850° C. for 30 minutes.

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Abstract

A method of producing a film includes: a heating treatment step of performing a heating treatment for ceramic particles; a film-forming step for forming the film by jetting, onto a substrate, an aerosol containing the ceramic particles which have been subjected to the heating treatment so as to make the ceramic particles adhere to the substrate; and an annealing-treatment step for performing an annealing treatment for the film. Accordingly, it is possible to previously vaporize and remove water and an additive which would otherwise cause gasification in the annealing treatment step, thereby preventing the defect and destruction of the film in the annealing treatment step. Thus, it is possible to provide a piezoelectric actuator plate, for ink-jet head, having satisfactory piezoelectric characteristics.

Description

[0001] This patent application claims priority based on Japanese Patent Application No. 2005-242986 filed on August 24, 2005, the entire disclosure of which is referred to and incorporated herein. technical field [0002] The present invention relates to a method of manufacturing a film and an inkjet head. Background technique [0003] As a method of manufacturing a piezoelectric actuator used in an inkjet head, for example, there is a method called an aerosol deposition (Aerosol Deposition) method (AD method). In Japanese Patent Laid-Open No. 2001-152360, it is disclosed that an object (aerosol) in which fine particles of a piezoelectric material such as lead zirconate titanate (PZT) are dispersed in gas is sprayed toward the surface of a substrate, and the fine particles collide with the substrate. , stacking, thereby forming a piezoelectric film method. [0004] Here, the piezoelectric film formed by the AD method as described above needs to be annealed in order to obtai...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B41J2/16H10N30/00
CPCC04B2235/5445C04B2235/3409C04B2235/3217C04B2235/6567H01L41/43C04B35/111B41J2/161H01L41/39C04B35/62645C04B35/491H01L41/314C04B2235/3203C04B2235/3249C04B2235/656C04B2235/5436C04B35/6262C23C24/04H01L41/1876B41J2/164H10N30/8554H10N30/074H10N30/097
Inventor 安井基博明渡纯
Owner BROTHER KOGYO KK