High frequency discharge excited gas laser oscillator

Abstract

A high-frequency discharge excited gas laser oscillator receiving power from a laser power supply controlled by a pulse command, the high-frequency discharge excited gas laser oscillator provided with a power detecting section for detecting supply power from the laser power supply to a discharge tube and a pulse command control circuit positioned at an upstream side of the laser power supply, comparing an allowable upper limit value (W) of supply power found from a relationship between a discharge tube temperature and supply power and an actual supply power detected by the power detecting section, stopping the pulse command value to the discharge tube when the supply power is higher than the allowable upper limit value, and setting a pulse command value based on the allowable upper limit value.

Description

technical field [0001] The present invention relates to a high-frequency discharge-excited gas laser oscillator suitable for a laser processing machine, which supplies electric power to a discharge tube from a laser power source controlled by pulse commands. Background technique [0002] Generally, in laser processing using a high-frequency discharge-excited gas laser oscillator, when high-quality drilling processing or stable cutting processing is performed, processing is performed using a pulse output laser controlled by a pulse command. This is because, as can be seen from the relationship between the discharge tube temperature and the peak output command value shown in FIG. 4 , the peak output value can be made higher at the time of the pulse output command than at the time of the CW output command. That is, it is due to the following reason: the temperature T at which the discharge tube breaks increases with the increase of the peak output value, but compared with the a...

AI Technical Summary

Problems solved by technology

Therefore, the pulse output depends on the accuracy of the conversion table, and there must be a limit to make the pulse output close to the upper limit.

In addition, the accuracy of the pulse output depends on the performance of the detector, and there is a difficulty in increasing the price of a detector that can respond at high speed

There is also a problem that the structure of the device is complicated because of the use of calculation units such as conversion tables

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