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Ldmos with independently biased source

An oxide semiconductor, high-power technology, applied in the direction of semiconductor devices, electrical components, electric solid-state devices, etc., can solve the problems of inconvenience, general products without structure, frequency, etc., to increase the scope of application, increase the stability of components and the scope of application Effect

Inactive Publication Date: 2007-05-16
TAIWAN SEMICON MFG CO LTD
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  • Abstract
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  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] Other power management applications require better protection against electrical breakdown; however, in traditional designs, the depth of N-wells is usually limited due to thermal budget considerations in the process
In the case where the depth of the N-type well is usually limited, the vertical electrical breakdown between the P-type base region and the P-type substrate will become frequent and easy to occur
This electrical breakdown may completely disable the LDMOS or further affect the operation of one or more circuits
[0006] It can be seen that the above-mentioned existing LDMOS elements obviously still have inconvenience and defects in structure and use, and need to be further improved urgently.
In order to solve the above-mentioned problems, the relevant manufacturers have tried their best to find a solution, but no suitable design has been developed for a long time, and the general products do not have a suitable structure to solve the above-mentioned problems. This is obviously related. The problem that the industry is eager to solve

Method used

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  • Ldmos with independently biased source
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Embodiment Construction

[0044] In order to further explain the technical means and effects of the present invention to achieve the intended purpose of the invention, the following in conjunction with the accompanying drawings and preferred embodiments, the lateral double-diffused metal oxide semiconductor with independent bias source proposed according to the present invention. Specific embodiments, structures, features and effects thereof are described in detail below.

[0045] Please refer to FIG. 1 , which is a conventional lateral double diffused metal oxide semiconductor (LDMOS) 100 . This conventional LDMOS100 can have lower on-state resistance in circuit applications (including in the high-voltage application range); however, if the circuit layout requires a circuit load to be inserted between the source and the electrical ground, then There is no way the component will stand up to this test. As shown in the figure, both the source and the drain of the LDMOS 100 are on the same active surface...

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Abstract

A power metal-oxide semiconductor device provides an P-type base region that includes the N+ device source and is biased differently than the P-type substrate by application of an electrical load. In one embodiment, an LDMOS device with a NPN configuration is used but the coupling of the device source to the base contact prevents the NPN parasitic device from operating. The P-type base is formed in an N-well that separates the base from the P-type substrate and surrounding P-wells. Vertical punch-through is prevented by a high-impurity N+ buried layer that separates the N-well from the P-type substrate.

Description

technical field [0001] The present invention relates to a semiconductor device, in particular to a structure that can allow a bias voltage to be applied in the base region and can limit the vertical electrical breakdown of a high-power metal oxide semiconductor device. . Background technique [0002] Common lateral double diffused metal oxide semiconductor (LDMOS) devices, such as high power metal oxide semiconductor (power MOS), can provide lower on-state resistance in circuit applications. These components are ideal for use at the output of power management circuits because of their low RC time constants. [0003] Common LDMOS structures have a very narrow channel length determined by the smaller P-type base area in the P-type well. The smaller P-type base region is defined by device self-aligned gate locations, one or more field oxide implants, and other reduce surface field (RESURF) structures. To prevent the parasitic bicarrier junction transistor from being turned o...

Claims

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Application Information

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IPC IPC(8): H01L29/78H01L27/04
CPCH01L29/0878H01L29/42356H01L29/0653H01L29/7816
Inventor 伍佑国陈富信蒋柏煜姜安民
Owner TAIWAN SEMICON MFG CO LTD
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