Correction-plate cyclic utilizing method for grinder pad finisher

Abstract

The present invention discloses a correction disk circulating utilization method of grinding pad collating device. It can repeatedly utilize the correction disk of grinding pad collating device, and can reduce cost. The described correction disk includes self-body and surface diamond attached to said self-body. When it is ground to the set condition, a dressing method or a sand-blasting method can be adopted so as to the surface of surface diamond be changed into irregular edge angle. Besides, said invention also provides the concrete steps of the described dressing method and described sand-blasting method.

Description

technical field [0001] The invention relates to a maintenance method for a polishing pad finisher, in particular to a recycling method for a correction disc of the polishing pad finisher. Background technique [0002] In the usual CMP (Chemical Mechanical Polishing) process, the polishing head (head or carrier) carries the silicon wafer (face down) and presses it on the polishing pad (CMP pad). After grinding to a certain point, the polishing pad will become blunt. Part of the ability to hold the abrasive slurry is lost. In addition, the dulling increases the contact area and causes a drop in pressure. Both of these changes will reduce the grinding rate. At this time, it is necessary to adjust the condition disk (Condition Disk) of the polishing pad finisher on the polishing pad to restore the rough surface of the polishing pad while grinding, so that it can hold and transmit the polishing slurry and make the contact surface smaller. Finishing and dressing restore the roug...

AI Technical Summary

Problems solved by technology

Combining the comparison of Figures 2 and 3, it can be seen that Figure 2 is a schematic diagram of diamonds on the edge surface of the correction disc of the new polishing pad finisher, and Figure 3 is a schematic diagram of diamonds on the edge surface of the correction disc of the used abrasive pad finisher, which can be clearly seen The edges and corners of the diamonds on the surface are worn, and the grinding rate will drop at this time. When the grinding rate drops to a certain level and cannot meet the process requirements, the correction disc of the polishing pad finisher has reached the end of its service life. The usual practice is to replace the correction disc. will increase the cost

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