Dual logarithmic amplifier phase-magnitude detector

Abstract

A power generation system including a RF power generator which provides a RF output power. The power distribution system includes a phase-magnitude detector module having a dual logarithmic amplifier phase-magnitude detector that receives current and voltage signals. The dual logarithmic amplifier phase-magnitude detector generates a phase signal that varies in accordance with the phase between the voltage signal and the current signal, and a magnitude signal that varies in accordance with the magnitude between the voltage and current signals. A controller receives the phase and magnitude signals, and communicates control signals to the matching network.

Description

[0001] References to related applications [0002] This application claims priority to US Provisional Application 60 / 713,656, filed September 2,2005. The contents of the above application are hereby incorporated by reference. technical field [0003] This invention relates to phase and amplitude detectors, and more particularly to a phase and amplitude detector implemented using a logarithmic amplifier. Background technique [0004] Conventional phase and magnitude detectors typically receive input voltage and input current signals and produce magnitude and phase output signals. The magnitude output signal typically mirrors the relationship of the magnitudes in the input signal. The phase output signal typically represents the phase difference between the input voltage and input current signals. In plasma generation systems, phase-amplitude detectors can be implemented in various configurations. [0005] One configuration uses a non-tunable (broadband) detector. Example...

AI Technical Summary

Problems solved by technology

Recently, two-frequency systems that produce intermodulation distortion products whose percentage frequencies are very close (less than 5%) to the desired signal frequency have resulted in suboptimal phase-amplitude detector performance

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