Unlock instant, AI-driven research and patent intelligence for your innovation.

Cleaning member and probe device

A component and probe technology, which is applied in the field of cleaning components and probe devices for high-efficiency cleaning probes, can solve the problems of poor cleaning effect and easy slipping, and achieve the effect of preventing short circuit between probes and improving cleaning efficiency

Active Publication Date: 2007-07-04
TOKYO ELECTRON LTD
View PDF2 Cites 5 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, as shown schematically in this figure (a), each fiber 7A is in sliding contact with the attachment O on the tip of the probe 4A during cleaning, and the attachment O is removed by the friction force at this time. However, due to the cross-section of each fiber 7A It is round or elliptical and slippery, and as shown in the figure (a), the contact area with the deposit O is an arc surface, which is very narrow, and there is a problem that the cleaning effect of the deposit O is poor.

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Cleaning member and probe device
  • Cleaning member and probe device
  • Cleaning member and probe device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0033] The present invention will be described below based on the embodiments shown in FIGS. 1 to 4 . In addition, FIG. 1 is a side view showing the main part of one embodiment of the probe device of the present invention, and FIG. 2(a), (b) is a view showing cleaning members used in the probe device shown in FIG. 1, respectively. , (a) is its perspective view, (b) is a schematic cross-sectional view after a part of it is enlarged, and Fig. 3 (a) and (b) respectively represent the state of cleaning the probe card with the cleaning part shown in Fig. 2 Figure 4, (a) is a horizontal top view showing the relationship between the fiber and the probe of the cleaning part, (b) is a side view showing the relationship between the fiber and the probe of the cleaning part, Figure 4 (a), (b) 5 is a view showing a state in which fibers of the cleaning member shown in FIG. 1 are entangled between probes.

[0034] As shown in FIG. 1 , the probe device 10 of this embodiment has: a movable m...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The present invention provided a cleaning member and probe device that can enhance cleaning efficiency and also prevent short circuit between probes resulted from fibers of the cleaning member during inspection. The cleaning member 10 has a base 121 and a brush 123 consisting of multiple insulating plastic fibers 122 made upright on the base 121. On an outer circumferential surface of the insulating plastic fibers 122, depressions 122A formed in the lengthwise direction of the insulating plastic fibers 122 are arranged over three lines spaced apart at predetermined intervals in the circumferential direction, thereby forming a cross section with three leaves.

Description

technical field [0001] The present invention relates to a cleaning member for cleaning probes of a probe card and a probe device having the cleaning member. More specifically, the present invention relates to a cleaning member and a probe device capable of efficiently cleaning probes. Background technique [0002] As shown in FIG. 6 , the configuration of the probe device includes a loading chamber 1 for transporting the object to be inspected (such as a wafer) W; 2. As shown in the figure, the detector chamber 2 has: a mounting table (wafer chuck) 3 arranged to be movable in the X, Y, Z, and θ directions and on which a wafer is placed; The probe card 4 and the clamping mechanism 5 for holding the probe card 4 . In the detector chamber 2, during the movement of the wafer chuck 3 in the X, Y, Z and θ directions, after the calibration mechanism 6 calibrates the wafer W and the probe 4A of the probe card 4, the indexing of the wafer W is performed. While conveying, the probe...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): A46B9/02A46D1/00H01L21/66G01R1/067G01R31/28
CPCG01R1/07307G01R3/00G01R31/2601B08B1/12
Inventor 河西俊洋小泉慎也
Owner TOKYO ELECTRON LTD