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Substrate convey method and device

A technology for conveying devices and substrates, applied in the directions of spraying devices, spraying devices, cleaning methods and utensils, etc., to achieve the effect of improving cleaning and drying effects, and improving cleaning or drying effects

Inactive Publication Date: 2007-07-11
TAKATORI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

And when cleaning, even if the cleaning water pressure and air pressure are increased, the substrate will not cause the substrate to zigzag or fall, etc.

Method used

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  • Substrate convey method and device
  • Substrate convey method and device
  • Substrate convey method and device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0047] Fig. 1 is a plan view showing the entire polarizing plate sticking device of a liquid crystal glass substrate including a conveying device for a substrate of the present invention.

[0048] The liquid crystal glass substrate (hereinafter referred to as substrate A) is cut into a predetermined size in the previous step not shown, and sent to the cullet washer 1 to remove the glass debris (cullet) attached to the surface of the substrate A during cutting. ). In the sheet cleaning machine 2, the cullet adhering to the surface of the substrate A is peeled off by grinding the sheet or the like and cleaned, and then the cullet on the surface of the substrate A is completely removed through the washing area 4 and the drying area 5 in the cleaning device 3. After that, the substrate A is transferred to the polarizing plate sticking device 6, and the polarizing plate B is stuck on both sides of the substrate A, so that the liquid crystal panel C is produced.

[0049] As shown in the...

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PUM

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Abstract

The present invention provides a substrate transporting method, when transporting, substrate, even minitype substrate, is prevented to drop, and the cost of the transporting apparatus is not increased. Otherwise, the effect of washing and drying the substrate may not be worse, and the maintainability of device is promoted, when washing the substrate, even hydraulic pressure and air pressure for washing are improved, zigzag movement and drop is not caused. A plurality of support rollers (20) having axes been orthogonal with transporting path are arranged on the substrate (A) transporting path, a plurality of circle transporting round belt (21) in parallel with the transporting path are straddle mounted between each support roller (20) and border support roller (20), and the support roller (20) is rotated in state that the transporting round belt (21) up and down on the transporting path clamps the substrate (A) such that the substrate (A) is transported along the transporting path.

Description

Technical field [0001] The present invention relates to a method and apparatus for transferring a substrate. More specifically, it relates to a method and apparatus that can surely clean and transfer the substrate when the substrate such as a small liquid crystal panel is cleaned. Background technique [0002] Previously, in the process of manufacturing a liquid crystal panel, two glass substrates were bonded together and cut into a predetermined size, and polarizing plates were glued on both sides of the glass substrate (hereinafter referred to as liquid crystal glass substrate) cut into the predetermined size. In this way, a liquid crystal panel is obtained. However, in the step of cutting the glass substrate into a predetermined size, glass chips called cullets are generated and adhere to the surface of the liquid crystal glass substrate. If the polarizing plate is stuck to the liquid crystal glass substrate in this state, the broken glass will exist as a foreign matter betwee...

Claims

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Application Information

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IPC IPC(8): G02F1/1333G02F1/13B65G49/06B08B3/04B05B1/04
CPCB65G49/067G02F1/1303H01L21/67706H01L21/67721
Inventor 妙见治彦小西善久堀口茂春
Owner TAKATORI
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