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Planetary system workpiece support and method for surface treatment of workpieces

a workpiece and surface treatment technology, applied in the direction of vacuum evaporation coating, mechanical equipment, gearing, etc., can solve the problems of correspondingly negative consequences for uniform workpiece treatment and negative effects on workpiece treatment homogeneity

Inactive Publication Date: 2005-04-07
OERLIKON TRADING AG TRUEBBACH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Benefits of technology

[0011] The task of the present invention is to develop further said workpiece support and to eliminate therein said disadvantages. This is realized by a planet system workpiece support of the above described type through its development according to the invention wherein the driving c...

Problems solved by technology

Inertially sluggish moon systems run therein past the stops without rotation incrementation, which has correspondingly negative consequences for the uniform workpiece treatment.
The jolt-like incremental rotational motion of the moon systems generally means that, especially with relatively short treatment times, in particular coating times of tools and correspondingly provided low treatment effect, respectively small layer thickness, negative effects on the treatment homogeneity on the workpieces result due to statistical fluctuations with respect to the resilient stop engagements and the orientation resulting therefrom of the substrates to the treatment sources.

Method used

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  • Planetary system workpiece support and method for surface treatment of workpieces
  • Planetary system workpiece support and method for surface treatment of workpieces
  • Planetary system workpiece support and method for surface treatment of workpieces

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Embodiment Construction

[0025] In FIG. 1 a first embodiment of a planet system workpiece support 100 is shown schematically, for reasons of clarity. A rotary drive 1 acts between a chamber wall 3, as a mechanical reference system of the configuration, and at least one workpiece support 100 according to the invention, releasably driving-coupled, such as via a coupling 5, with the drive 1. The rotary drive is conventionally disposed outside of the chamber with the chamber wall 3 and guided through with a vacuum-tight rotational through guide. The workpiece support 100 comprises a sun system axle 7, rotatably supported on the mechanical reference system 3. Under driving, this carries out the sun rotational motion ωs. On the at least one sun wheel 9, connected torsion-tight with the sun system axle 7, is rotationally supported one or several planet axles 11 parallel to the sun system axle 7. They are engaged via a planet drive wheel 13, preferably meshing via a toothed wheel, with a transfer ring 15, fixed wit...

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Abstract

A planet system workpiece support for a vacuum treatment apparatus includes a sun system rotatable in the vacuum treatment apparatus about a sun system axle to be coupled to a drive. At least one planet system is rotatable on planet axle and is supported on the sun system. The planet system has a driving coupling for driving the planet system and the support has at least one moon system supported on the planet system and rotatable about a moon axle with a driving connection to the sun system. At least one workpiece is received on the moon system and the driving connection is established, at least during operation, uninterruptedly between sun system and moon system.

Description

CROSS-REFERENCE TO RELATED APPLICATIONS [0001] This is a continuation of application Ser. No. 09 / 879,527 filed Jun. 12, 2001, now abandoned, which was a continuation of international application PCT / CH99 / 00602 filed Dec. 15, 1999, which claimed priority on Swiss application 2477 / 98 filed Dec. 15, 1999, which priority claim is repeated here.FIELD AND BACKGROUND OF THE INVENTION [0002] The present invention relates to a planetary system workpiece support as well as a surface treatment method for workpieces. [0003] It relates fundamentally to workpiece support engineering for vacuum treatment and, in particular, vacuum coating installations. The goal of workpiece support engineering is always to move the workpieces past treatment sources, such as in particular coating sources and etching sources, such that as uniform as possible a treatment effect, in particular coating thickness and coating quality is ensured on all surfaces to be treated of the workpieces. [0004] In the not prior pub...

Claims

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Application Information

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IPC IPC(8): C23C14/50F16H37/00H01L21/00H01L21/687
CPCC23C14/505H01J2237/202Y10T74/19H01L21/68764H01L21/68771H01L21/6715
Inventor ZAECH, MARTINKUNZ, ANTON
Owner OERLIKON TRADING AG TRUEBBACH
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