Nanotube Structures, Materials, and Methods
a technology of nanotubes and nanotubes, applied in the field of materials science, can solve the problems of arrays or other sets of nanotubes having a relatively low packing density of nanotubes in the array or s
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example 1
Growth of vertically aligned Nanotube Structures
[0085]A four inch single crystal silicon substrate was cleaned by immersion in a 4:1 bath of H2SO4 / H2O2, maintained at 120° C., for 10 minutes. The substrate was then rinsed in water and immersed in a 5:1:1 bath of H2O / H2O2 / HCl, maintained at 90° C., for 10 minutes. The substrate was then rinsed in water and immersed in a 50:1 HF:H2O bath, at room temperature, for 1 minute. The substrate was then rinsed in water and spun dry.
[0086]500 nm of SiO2 were thermally grown on the cleaned substrate followed by 20 nm Al2O3 deposited by sputtering from an Al2O3 target. Straight, 12.5 μm wide boundaries, separating regions to become active surface, were fabricated using lithography, such that each region was a 1 mm wide strip that traversed the length of the wafer. 1 nm of Fe was then deposited on these regions using electron beam deposition, and then the photoresist mask was lifted off.
[0087]The wafer was then coated with a protective photoresis...
example 2
Compressing Nanotube Structures
[0091]A sample grown using the procedure of Example 1 is placed in an arbor press (e.g. DEVIN LP-500(TM)) and 1 ton of force applied through a polished stainless steel plate placed on top of the sample. Force is applied in a direction parallel to the growth direction.
[0092]A sample is grown using the procedure of Example 1. To establish an initial height, the sample is first z-pressed with an arbor press using metal spacers. With the spacers still in place, a glass slide is then placed over the film with two 200 g weights over the slide. The spacers are then slid in toward each other and the film is subsequently pressed in the x-direction. Further compression in the z-direction can be performed by changing the spacer heights and using the arbor press.
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