Manufacturing device and manufacturing method for polymer waveguide device
a manufacturing method and technology of a polymer waveguide device, applied in the direction of manufacturing tools, photomechanical devices, instruments, etc., can solve the problems of increasing the cost and size of the manufacturing of masks of small-size waveguide devices, affecting the production efficiency of polymer waveguide devices, and affecting the reliability of the manufacturing method
Inactive Publication Date: 2010-06-03
NAT CENT UNIV
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Benefits of technology
The present invention provides a manufacturing device and method for polymer waveguide devices using a femtosecond laser and a photoresist polymer membrane. This method eliminates the need for complicated manufacturing processes and improves production efficiency. The device includes a work platform, substrate, femtosecond laser, and lens. The method involves coating the substrate with a photoresist polymer membrane, setting it on the work platform, and using the femtosecond laser to form the polymer waveguide element. A developer is then used to wash the polymer waveguide element. This method simplifies the production process of polymer waveguide devices.
Problems solved by technology
Even now, the age of peak scientific achievement, how to control such thing that moves in straight lines and runs the most fast available in the universe is still a challenge for scientists.
Furthermore, the vibration that troubles conventional optical tests disappears after integration of elements.
However, the optical Lithography includes a plurality of complicated steps and the manufacturing of masks of small-size waveguide devices is more difficult in consideration of cost and size.
Moreover, waveguide devices with 45-degree inclined planes are unable to be produced by optical lithography.
Thus additional processing is required to produce the inclined planes with an angle of 45 degrees and the cost is increased.
However, the laser precision machining requires precise alignment.
Therefore, the production efficiency of the waveguide devices is reduced.
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[0019]A manufacturing device includes a work platform 10, a substrate 20, a femtosecond laser 30 and a lens 40. The substrate 20 coated with a photoresist polymer membrane 22 is set on the work platform 10. The femtosecond laser 30 emits onto the photoresist polymer membrane 22 to generate a polymer waveguide element 222, as shown from FIG. 4A to FIG. 4E. The lens 40 is disposed between the femtosecond laser 30 and the substrate 20. Next a developer (not shown in figure) is used to wash photoresist polymer membrane 22 so as to get the polymer waveguide element 222.
[0020]The femtosecond laser 30 generates pulses in femto second scale (fs, (10−15 second). The femtosecond laser 30 includes a femtosecond Cr:forsterite laser and a femtosecond Ti:sapphire laser. The femtosecond Cr:forsterite laser operates at 1230-nm with a 100-fs. At a 110 MHz repetition rate, the output power could be as high as 300-500 mW. The Ti:Sapphire laser is tuned from 700 nm to 900 nm, with an average output pow...
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Abstract
A manufacturing device and a manufacturing method for polymer waveguide devices are revealed. The manufacturing device includes a substrate coated with a photoresist polymer membrane and set on a work platform, a femtosecond laser emitting onto the photoresist polymer membrane, and a lens arranged between the femtosecond laser and the substrate. The polymer waveguide devices are obtained by the femtosecond laser emitting onto the photoresist polymer membrane. Without complicated manufacturing processes, the production efficiency of the polymer waveguide devices is increased.
Description
FIELD OF INVENTION[0001]The present invention relates to a manufacturing device and a manufacturing method for optical waveguide elements, especially to a manufacturing device and a manufacturing method for polymer waveguide elements.DESCRIPTION OF RELATED ART[0002]During the process of exploring light, each step moves quite slow. From totally ignorant of light, knowing more about natures of light, directions and behaviors of light can finally be controlled. Even now, the age of peak scientific achievement, how to control such thing that moves in straight lines and runs the most fast available in the universe is still a challenge for scientists. The development of elements related to optics seems quite slow. Due to broadband characteristics of light, people are urgent to manipulate the lights in the age of information overload.[0003]The velocity of light is the most fast—about three hundred thousand kilometers per second. The coherence of light is maintained and there is no interfer...
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IPC IPC(8): G03F7/20B29C35/08
CPCG03F7/2004G02B6/138
Inventor TAI, CHAO-YITZENG, JIA-WEI
Owner NAT CENT UNIV