Films and structures for metal oxide semiconductor light emitting devices and methods
a technology of metal oxide semiconductor and light-emitting device, applied in the field of semiconductors, can solve the problems of significant affecting device sensitivity, response time, read-out noise, etc., and achieve the effects of improving the ability to determine the path, improving the confinement of carriers, and improving the blockage of carrier flow
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OF THE INVENTION
[0149]With the foregoing discussion in mind, the following is a detailed description of various embodiments and examples of the present invention.
[0150]FIG. 1 is a schematic diagram showing a ZnO based LED semiconductor device in accordance with the invention. In the example of FIG. 1, the illustrated embodiment comprises a BeZnO alloy based semiconductor device grown on an n-type ZnO single crystal substrate. FIG. 2 illustrates the relative energy band gap values for the device shown in FIG. 1.
[0151]In one example, the device 100 shown in FIG. 1 comprises:
[0152]an electrode (101);
[0153]an n-type ZnO single crystal substrate (102);
[0154]a 50 nm thick ZnO buffer layer (103);
[0155]a 30 nm thick n-type ZnO semiconductor layer doped with Ga (104);
[0156]a 30 nm thick n-type BeZnO semiconductor first cladding layer doped with Ga (105), wherein the energy band gap energy is higher than the energy band gap of the previously formed 30 nm thick n-type ZnO semiconductor layer d...
example of manufacture
[0203]In one such example, a polished n-type ZnO wafer cut from a bulk crystal was used as the substrate. The wafer was placed in a hybrid beam deposition reactor, and heated to approximately 750° C. The pressure was reduced to approximately 1×10−5 Torr and the substrate cleaned with RF oxygen plasma for 30 minutes. The temperature was then lowered to 650° C., and then onto the substrate a buffer layer of ZnO was deposited to approximately 50 nm thickness. Then a layer of n-type ZnO doped with Ga was deposited to approximately 30 nm thickness on the buffer layer. During the deposition of the n-type ZnO semiconductor film a thermally controlled Knudsen cell containing Ga was heated to produce a beam of Ga vapor that impinged on the substrate simultaneous with the beams used to grow ZnO. Then, onto the 30 nm n-type ZnO film a layer of n-type BeZnO doped with Ga was deposited to approximately 30 nm thickness. During the deposition of the n-type BeZeO semiconductor alloy film a thermall...
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Abstract
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