Pattern fortification for HDD bit patterned media pattern transfer

a technology of patterned media and pattern transfer, which is applied in the direction of patterned record carriers, different record carrier forms, instruments, etc., can solve the problems of affecting and reducing the detection efficiency of soft masking materials

Inactive Publication Date: 2014-05-15
APPLIED MATERIALS INC
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Such trends create challenges in maintaining separation and addressability of the domains.
For example, as magnetic domains grow smaller and closer together, maintaining a detectable separation of the magnetic fields present in the domains becom

Method used

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  • Pattern fortification for HDD bit patterned media pattern transfer
  • Pattern fortification for HDD bit patterned media pattern transfer
  • Pattern fortification for HDD bit patterned media pattern transfer

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Embodiment Construction

[0015]The inventors have discovered a new class of processes for creating a pattern of magnetic properties on a substrate, and apparatus for performing the processes. A structural substrate with a magnetically susceptible layer formed thereon is coated with a metal nitride film, which is patterned to form a mask. The substrate is then treated by exposure to a plasma, which alters magnetic properties of the magnetically susceptible layer according to the pattern of the mask. The mask is then stripped away, leaving a substrate with a magnetically susceptible layer having a pattern of magnetic properties.

[0016]FIG. 1 is a flow diagram summarizing a method 100 according to one embodiment. The method 100 may be used to form a substrate having a pattern of magnetic properties consisting of a first plurality of domains having a first value of a magnetic property separated by a second plurality of domains having a second value of the magnetic property detectably different from the first val...

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Abstract

A method and apparatus for forming a magnetic layer having a pattern of magnetic properties on a substrate is described. The method includes using a metal nitride hardmask layer to pattern the magnetic layer by plasma exposure. The metal nitride layer is patterned using a nanoimprint patterning process with a silicon oxide pattern negative material. The pattern is developed in the metal nitride using a halogen and oxygen containing remote plasma, and is removed after plasma exposure using a caustic wet strip process. All processing is done at low temperatures to avoid thermal damage to magnetic materials.

Description

CROSS-REFERENCE TO RELATED APPLICATIONS[0001]This application claims benefit of U.S. Provisional Patent Application Ser. No. 61 / 726,234 filed Nov. 14, 2012, which is incorporated herein by reference.FIELD[0002]Embodiments described herein generally relate to methods and apparatus for producing magnetic media. More specifically, embodiments described herein relate to methods and apparatus for creating a pattern of magnetic properties in a magnetically active surface.BACKGROUND[0003]Magnetic media are important information storage devices, prominent examples of which are hard disk drives and magnetic memory devices such as MRAM. Magnetic media are generally characterized by a surface with an addressable pattern of magnetic properties that enable localized alteration of a detectable property of the surface. Typically, domains of magnetically active material are separated by domains of magnetically inactive material, so that a magnetic property of one domain, such as residual magnetism,...

Claims

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Application Information

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IPC IPC(8): H01L43/12
CPCH01L43/12G11B5/746G11B5/855H01F41/34G11C11/16H01L21/2855H01L21/3081H10N50/01
Inventor GOUK, ROMANVERHAVERBEKE, STEVENKONTOS, ALEXANDERALLEN, ADOLPH MILLERMORAES, KEVIN
Owner APPLIED MATERIALS INC
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