Information recording apparatus

Abstract

An information recording apparatus comprises a vacuum chamber, an energy beam generator emitting an energy beam for recording information on a substrate in the vacuum chamber, a spindle motor rotating the substrate in the vacuum chamber, a movable holder disposed in the vacuum chamber for carrying the spindle motor, and a feed motor unit connected to the movable holder for linearly moving the substrate in a vacuum atmosphere within the vacuum chamber. The holder, the vacuum chamber, and the energy beam generator are fixed to a common plate-shaped base member. The feed motor unit is connected to the movable holder by means of a hollow rod, a flexible sleeve element being provided over the rod between the feed motor unit and the vacuum chamber wall.

Description

FIELD OF THE INVENTIONThe present invention relates to an information recording apparatus for forming patterns on rotating substrates, e.g. for manufacturing information carriers or masters therefor. Such information carriers include optical and magnetic storage devices such as optical disks, magneto-optical discs and patterned magnetic media. More specifically, the present invention relates to an apparatus for writing and / or editing such information carriers or masters by means of an energy beam such as an electron beam or ion beam.BACKGROUND OF THE INVENTIONA master or information carrier of the above type includes small structures, typically in the nanometer range, which must be produced in a highly evacuated atmosphere. In practice, the energy beam is focused on a recording medium or substrate which is rotated inside a vacuum chamber. By moving the rotating recording medium radially, the energy beam is made to write the information on the recording medium in a helical path, ther...

AI Technical Summary

Benefits of technology

"The present invention provides an information recording apparatus for forming patterns on rotating substrates with high accuracy. The apparatus has a common base member that fixes the holder, vacuum chamber, energy beam generator, spindle, and feed motor unit, which simplifies assembly and reduces dimensional changes in the vacuum chamber. The apparatus is easy to maintain and assemble. The invention also provides a distance sensor to continuously monitor the distance to the recording medium and take correcting measures, further minimizing the influence of any dimensional changes in the apparatus. The technical effects of the invention include improved accuracy, simplified assembly, and reduced dimensional changes."

Problems solved by technology

This prior art apparatus suffers from a number of drawbacks.

First, the apparatus is sensitive to changes in ambient temperature and to mechanical vibrations.

Such changes will translate into dimensional changes affecting the accuracy with which the structures can be produced on the recording medium.

Second, it is a laborious task to mount the electron beam generator precisely perpendicular to the recording medium, complicating both assembly and maintenance of the apparatus.

Also, the walls of the vacuum chamber might flex during assembly of the apparatus, thereby changing presumably known dimensional relationships and necessitating excessive fine adjustments on a trial and error basis.

Third, it is difficult to completely prevent magnetic fields from entering the vacuum chamber.

Generally speaking, this apparatus suffers from the same drawbacks as the apparatus described by way of introduction.

By placing the feed motor unit outside the vacuum chamber, the magnetic field inside the vacuum chamber is reduced, but instead there is an increased risk of leaks, since it is difficult to provide a durable seal between the moving screw bar and the opening in vacuum chamber wall.

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