Cross sectional depth composition generation utilizing scanning electron microscopy

a scanning electron microscope and composition technology, applied in the direction of material analysis using wave/particle radiation, material analysis by measuring secondary emission, instruments, etc., can solve the problems of too small deconstructibility or too fragile cross-sections

Inactive Publication Date: 2017-07-11
IBM CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

In many instances, the specimens to be cross-sectioned are too fragile or too small to deconstruct or cross-section, or the specimens need to be preserved for other analyses where non-destructive testing is needed.

Method used

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  • Cross sectional depth composition generation utilizing scanning electron microscopy
  • Cross sectional depth composition generation utilizing scanning electron microscopy
  • Cross sectional depth composition generation utilizing scanning electron microscopy

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Embodiment Construction

[0017]In accordance with the present principles, a scanning electron microscope (SEM) is employed to analyze materials to generate a cross-sectional depth composition into a surface of a sample. This is especially useful for small samples that are extremely difficult to manually cross-section and for specimens where non-destructive testing is needed. In one embodiment, a SEM creates a cross-sectional view into the sample by varying a beam voltage of the SEM. A cross-sectional depth composition of a surface is determined by performing a plurality of point scans using a SEM at various beam energy levels and then comparing electron dispersive X-ray spectroscopy (EDS) results at those various energy levels to create a depth composition.

[0018]In one illustrative method, beam penetration (which has a tear drop shape) is measured at various beam energy levels. As the beam energy is progressively increased or decreased, the composition that is measured by EDS detectors changes. These change...

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Abstract

A method for generating cross-sectional profiles using a scanning electron microscope (SEM) includes scanning a sample with an electron beam to gather an energy-dispersive X-ray spectroscopy (EDS) spectrum for an energy level to determine element composition across an area of interest. A mesh is generated to locate positions where a depth profile will be taken. EDS spectra are gathered for energy levels at mesh locations. A number of layers of the sample are determined by distinguishing differences in chemical composition between depths as beam energies are stepped through. A depth profile is generated for the area of interest by compiling the number of layers and the element composition across the mesh.

Description

BACKGROUND[0001]Technical Field[0002]The present invention relates to characterizing layers of an object, and more particularly to systems and methods for generating cross-sectional composition and structural information using a scanning electron microscope (SEM).[0003]Description of the Related Art[0004]A scanning electron microscope (SEM) produces images of a sample or specimen by scanning with a focused beam of electrons. The electrons interact with atoms in the sample and produce signals that include information about a sample's surface topography and composition. An electron beam is scanned, and its position is combined with a detected signal to produce an image. SEM can achieve resolutions of better than 1 nanometer.[0005]The electron beam may have an energy ranging from 0.2 keV to 40 keV and is focused by one or more condenser lenses. The beam scans in a raster pattern over an area of a sample. SEM can provide several items of data at each pixel. One example includes energy-d...

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Application Information

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Patent Type & Authority Patents(United States)
IPC IPC(8): G01N23/225G01B15/00G01B15/04
CPCG01N23/2252G01B15/00G01B15/04G01N2223/079G01N2223/418G01B15/02G01N23/22H01J2237/221H01J2237/24578H01J2237/24585H01J2237/248H01J2237/2807G01N2223/304G01N2223/633H01J37/222H01J37/28H01J2237/2815
Inventor CAMPBELL, ERIC J.CZAPLEWSKI, SARAH K.
Owner IBM CORP
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