Cross sectional depth composition generation utilizing scanning electron microscopy

Abstract

A method for generating cross-sectional profiles using a scanning electron microscope (SEM) includes scanning a sample with an electron beam to gather an energy-dispersive X-ray spectroscopy (EDS) spectrum for an energy level to determine element composition across an area of interest. A mesh is generated to locate positions where a depth profile will be taken. EDS spectra are gathered for energy levels at mesh locations. A number of layers of the sample are determined by distinguishing differences in chemical composition between depths as beam energies are stepped through. A depth profile is generated for the area of interest by compiling the number of layers and the element composition across the mesh.

Description

BACKGROUND[0001]Technical Field[0002]The present invention relates to characterizing layers of an object, and more particularly to systems and methods for generating cross-sectional composition and structural information using a scanning electron microscope (SEM).[0003]Description of the Related Art[0004]A scanning electron microscope (SEM) produces images of a sample or specimen by scanning with a focused beam of electrons. The electrons interact with atoms in the sample and produce signals that include information about a sample's surface topography and composition. An electron beam is scanned, and its position is combined with a detected signal to produce an image. SEM can achieve resolutions of better than 1 nanometer.[0005]The electron beam may have an energy ranging from 0.2 keV to 40 keV and is focused by one or more condenser lenses. The beam scans in a raster pattern over an area of a sample. SEM can provide several items of data at each pixel. One example includes energy-d...

AI Technical Summary

Benefits of technology

This patent describes methods and systems for generating cross-sectional profiles of samples using a scanning electron microscope (SEM) and energy-dispersive X-ray spectroscopy (EDS). The techniques involve scanning samples with an electron beam to gather EDS spectra for multiple energy levels, identifying elements present in the samples, generating a mesh on the sample, gathering EDS spectra for multiple layers at the mesh locations, and analyzing the chemical compositions between adjacent layers. These methods and systems can provide valuable information about the composition and structure of samples, which can be useful in various fields such as materials science and electronics.

Problems solved by technology

In many instances, the specimens to be cross-sectioned are too fragile or too small to deconstruct or cross-section, or the specimens need to be preserved for other analyses where non-destructive testing is needed.

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