Segmented coil for generating plasma in plasma processing equipment
a technology of generating plasma and segmented coils, which is applied in the field of segmented coils for transformer coupled plasma sources (tcp) sources, can solve the problems of reducing the uniformity of etching, and not providing the same uniformity at all operating pressures, so as to improve the spatial uniformity of rf power coupling and improve the uniformity of plasma and process.
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first embodiment
[0023]FIG. 3 is a schematic drawing of a segmented TCP coil configuration according to the invention. As shown in FIG. 3, the TCP coil 50 is divided into two concentric coil segments, each including an inner terminal, an outer terminal and at least one arcuate conductor portion extending between the inner and outer terminals. The two concentric coil segments are electrically connected in series with each other and are electrically connected in series to an RF source (not shown). The coil 50 includes a first inner coil segment 52 and a second outer coil segment 54. An inner tap labeled (+), and an outer tap, i.e. terminal, labeled (−) are provided to facilitate connection to the RF circuitry. An adjustable (i.e., variable) capacitor Ci is connected across the first coil 52 segment to reduce or shunt current that would otherwise flow through the first coil. This segmented coil arrangement allows the plasma uniformity to be varied. This is done by changing the value of Ci, which varies...
second embodiment
[0025]A segmented TCP coil according to the invention is illustrated in FIG. 4. Referring to FIG. 4, instead of shunting the first coil segment 52 with a capacitor Ci, a switch S1 is used to reduce or shunt the current that would otherwise flow through the first coil segment. Using the switch S1, there are two modes of operation. In one mode, the first coil segment 52 and the second coil segment 54 are connected in series when the switch S1 is open and the effects are similar to the FIG. 3 embodiment when the value of Ci is low. In the second mode, the second coil segment 54 is connected in series with a shunted first coil segment 52 when the switch S1 is closed and the effects are similar to the FIG. 3 embodiment when the value of Ci is high.
third embodiment
[0026]FIG. 5 is an illustration of the segmented TCP coil. As shown in FIG. 5, instead of shunting the first coil segment 52, a switch S2 is connected between the second coil segment 54 and the input to the first coil segment 52 to selectively remove the first coil segment 52 from the RF circuitry. Using the switch S2, there are two modes of operation. In the first mode, the first coil segment 52 and the second coil segment 54 are connected in series when the switch S2 is closed and the effects are similar to the FIG. 3 embodiment when the value of Ci is low. In the second mode, the first coil segment 52 is disconnected from the RF circuitry and the second coil segment 54 is connected in series with the RF circuit, when the switch S2 is open, the effect being similar to the FIG. 3 embodiment when the value of Ci is high.
[0027]The segmented TCP coil described in the embodiments above permits control of the plasma processing on different parts of the substrate undergoing treatment. Fo...
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Abstract
Description
Claims
Application Information
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