Method for making ink-jet printing head using liquid jet flow to guide laser
An inkjet print head and liquid jet technology, which is applied in the field of manufacturing print heads for inkjet printers, can solve the problems of expensive process equipment, difficulty in controlling the cone angle of the side wall surface, sandblasting pollution, etc.
Inactive Publication Date: 2007-09-12
SAMSUNG ELECTRONICS CO LTD
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Problems solved by technology
However, the disadvantage of the dry etching method is that the process cost is high because the process equipment is expensive, and it is difficult to control the taper angle of the sidewall surface during etching, because the sidewall is etched isotropically, so that the etched sidewall is close to about 90 degrees
[0022] In addition, the disadvantage of the sandblasting method is that fine sandblasting is used. During the process, the sandblasting is easy to cause contamination due to entering into the structure of the substrate 1, thereby constituting a micro-electromechanical system. The precision of this process is very poor, and After the process is completed, it is necessary to remove the post-process of sandblasting
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[0048] Hereinafter, the method for manufacturing an inkjet printhead using a liquid jet guiding laser of the present invention will be described in detail with reference to the accompanying drawings. In the drawings and detailed description, the same components as those of the prior art will be described and introduced with the same reference numerals as those used to introduce the prior art.
[0049] 5 is a flow diagram illustrating a process in a method of manufacturing an inkjet printhead using a liquid jet guided laser, according to an embodiment of the present invention.
[0050] First, similar to the fabrication of the conventional print head 10 shown in FIG. 2A, by performing a coating process, an ion implantation process, a photolithography process, etc., in a reaction chamber (not shown), silicon in a thickness range of 100 to 600 μm A heater 6 and a protective layer 5 (S1) are formed on the front side of a substrate (silicon wafer, silicon wafer) 1, and then a proces...
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The present invention discloses a method for making ink jet printing head by utilizing hydrofluidic to guide laser. Said method includes at least one process for forming ink supplying portion, and the ink supplying portion forming process includes the following steps: fixing a substrate on supporting table in reaction chamber and utilizing hydrofluidic guide laser to make the ink supply portion to required depth in the substrate. Besides, it also includes substrate-cutting process, can cut the substrate into the form of chip.
Description
technical field [0001] The present invention relates to a method of manufacturing a printhead for an inkjet printer, and in particular to a method of manufacturing an inkjet printhead in which laser light is guided using a liquid jet combining a laser beam with a microliquid-jet (liquid-jet guided laser) forming the ink supply portion of the print head in the substrate or cutting and forming the substrate with one or more print heads. Background technique [0002] In general, consumer demand for inkjet printers is growing rapidly due to the fact that inkjet printers produce less noise and have better resolution than other printers. In addition, inkjet printers are capable of color printing. [0003] In addition, in recent ten years, along with the development of semiconductor technology, the technology for manufacturing a print head, which is a core part of an inkjet printer, has been rapidly developed. As a result, it has become possible to use a print head provided with ...
Claims
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IPC IPC(8): B41J2/16
Inventor 高相喆金光烈
Owner SAMSUNG ELECTRONICS CO LTD