Method and apparatus for enhancing measuring sensitivity of rotating corner

Abstract

The invention relates to a method and device used to increase rolling angle measuring sensitivity. It belongs to photoelectric detection technique field. It is orderly set quarter wave plate, reflector, and plane reflecting mirror on light axis after collimation laser through polarizer and semi lens reflecting mirror; utilized plane reflecting mirror to make the light oppositely through reflector for two times, and quarter wave plate for four times. It can raise measuring sensitivity for two times based on 1687701A patent disclose number, and make the reflector move together with the rail to eliminate additive error, made the apparatus structure more compact to enhance its practicability at the same time. In addition, a receiving unit is added to realize rolling angle, pitch angle, deflection angle paralleling real time high accuracy measurement under the condition of unchanging measuring light path.

Description

technical field [0001] The invention belongs to the technical field of angle optical measurement, in particular to a roll angle measurement method and a roll angle measuring instrument thereof. Background technique [0002] Roll angle is an important parameter in error compensation. Systems such as machine tools and three-coordinate measuring machines need to measure roll angles, pitch angles, and yaw angles in order to correct Abbe errors in real time. In addition, in the installation and calibration of some workpieces, it is also necessary to measure or position the roll angle. [0003] For the optical measurement method of linear guide roll angle, the laser polarization measurement method is a method that has been studied more at present. Zhang Enyao of Tsinghua University and others disclosed a roll angle photoelectric detection method and device based on orthogonal double polarized light in Chinese patent No. 02123642. The device mainly uses time-sharing modulation o...

AI Technical Summary

Problems solved by technology

The moving part of this method has cables, which brings inconvenience to on-site measurement

The Chinese patent No. 01130893.1 uses a half-wave plate as a sensitive device. This method measures the roll angle by detecting the phase, but the laser is expensive and the control circuit is extremely complicated.

Chinese Patent Publication No. 1687701A uses a quarter-wave plate as a roll angle sensitive device, and uses a Wollaston prism to split the beam, and obtains the roll angle by detecting the change in the light intensity of the two split beams, but the measurement sensitivity is not high enough.

Among them, the latter two methods are to fix the reflector on the other side of the measuring guide rail so that the optical path passes through the roll angle sensitive device twice, but neither can make the reflector move together with the roll angle sensitive device

The former is because the movement of the reflector with the guide rail will affect the phase change, which will bring additional errors to the measurement; the latter will bring changes to the light intensity difference between the two split beams due to the movement of the reflector, which will also bring additional errors to the measurement

Therefore, both methods do not allow the reflector to move with the measuring rail, making the instrument less compact

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