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Method for extracting two-way harmonic wave of condenser type micro-gyroscope responsive signals and extraction apparatus therefor

A sensitive signal and harmonic extraction technology, applied in the field of sensing, can solve the problems of increasing the complexity of the circuit, it is difficult to stably separate the driving and sensitive two quadrature signals of the same frequency with high precision, and the effect is not ideal, so as to achieve adaptability Ability to improve, solve the problem of zoom-in and pick-up, and reduce the effect of requirements

Inactive Publication Date: 2008-02-13
SOUTHEAST UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

It is difficult to stably separate the driving and sensitive two quadrature signals of the same frequency with high precision by using the phase-sensitive detection method
There are also many methods that use high-frequency signals as carrier waves to add to sensitive capacitors in an attempt to solve the coupling problem of the original same-frequency signals, but the effect is not ideal, and it also increases the complexity of the circuit.

Method used

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  • Method for extracting two-way harmonic wave of condenser type micro-gyroscope responsive signals and extraction apparatus therefor
  • Method for extracting two-way harmonic wave of condenser type micro-gyroscope responsive signals and extraction apparatus therefor
  • Method for extracting two-way harmonic wave of condenser type micro-gyroscope responsive signals and extraction apparatus therefor

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Embodiment 1

[0027] Embodiment 1 A method for extracting harmonics of a capacitive micro-gyroscope dynamic sensitive signal involving sensing technology. The fundamental wave signal sent by the fundamental wave signal source 2 is level-converted by the amplifier 7 and then sent to the micro-gyroscope common capacitance electrode G and The drive capacitor electrodes C and D of the micro-gyroscope are respectively biased with positive and negative DC, and at the same time pass through the capacitor AC virtual ground. Then, the sensitive signals are respectively extracted from the sensitive capacitor electrodes A and B and passed through the inverting amplifiers 3 and 4. , the differential amplification is performed by the differential amplifier 5, and the output signal is subjected to phase-sensitive rectification and low-pass amplification to obtain the sensitive signal of the micro-gyroscope. Phase amplifiers 10, 11, the output signals of the two inverting amplifiers 10, 11 are then sent to...

Embodiment 2

[0030] Embodiment 2 A dual-channel harmonic extraction device for obtaining dynamic sensitive signals of a micro-gyroscope is composed of a micro-gyroscope public capacitance electrode G, driving capacitance electrodes C, D and sensitive capacitance electrodes A, B, and the sensitive capacitance electrodes A, B AC virtual ground, driving capacitor electrodes C and D pass through capacitor AC virtual ground, driving capacitor electrodes C and D are respectively connected to positive and negative DC bias voltages, and sensitive capacitor electrodes A and B are respectively connected with inverting amplifiers 3 and 4 and Connect with the input end of inverting amplifier 3,4 respectively, be connected with differential amplifier 5 on inverting amplifier 3,4 output end and inverting amplifier 3,4 output end are connected with two input ends of differential amplifier 5 respectively, On the output end of differential amplifier 5, be connected with phase-sensitive rectifier 9 and be co...

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Abstract

It is two-way harmonic wave extraction method and its apparatus of the capacitor micro gyro sensitive signals. The basic wave signals are output to micro gyro public capacitor electrode after amplifier level transformation and let the drive capacitor electrode bias with positive and negative current and separately extract sensitive signals from the sensitive capacitor electrode and anti-phase amplify and differential amplify these signals. The output signals can be turned into micro gyro sensitive signals after phase-sensitive rectifier and low magnification. It is to separately extract signals from the micro gyro drive capacitor electrode and output them to the anti-phase amplifier and the output signals are then differentially amplified. The output signals of the differential amplifier serves as the control signals of the phase reference end of the phase-sensitive rectifier after double frequency and phase deviation and its apparatus comprises the public capacitor electrode with micro gyro, drive capacitor electrode and sensitive capacitor electrode.

Description

technical field [0001] The invention relates to sensing technology, in particular to a two-way harmonic extraction method and an extraction device for capacitive micro-gyroscope sensitive signals. Background technique [0002] The resonant micro-gyroscope uses the alternating electrostatic force between the capacitor plates to make the vibrator vibrate mechanically, and uses the Coriolis force generated by the rotational angular velocity to make the vibrator vibrate in the direction orthogonal to the driving direction. This quadrature vibration is detected by another set of sensing capacitors. The traditional signal conditioning method is to add a DC bias to the common electrode G, add a sinusoidal driving voltage with a difference of 180° to the C and D electrodes, and detect the capacitance change on the A and B electrodes. Since the dynamic capacitance is very small, about 2pf, the capacitance change caused by the Coriolis force is even smaller, about 1%. A and B need t...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01C19/56G01C19/5726
Inventor 陈建元苏岩周百令赵琪
Owner SOUTHEAST UNIV