Self-lubricated composite plating in multiple layers and preparation method
A multi-layer composite and composite coating technology, applied in the direction of coating, metal material coating process, superimposed layer plating, etc., can solve the problems of easy adhesion, reduce friction performance, etc., and achieve difficult effect and reduce internal stress. , The effect of improving the interface bonding strength
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[0012] MoS with ordinary layered structure 2 Powder, pure S powder and metal Mo flakes are the basic raw materials. layered MoS 2 The powder and pure S powder were mixed at a mass ratio of 4:1, and high-energy ball milled for 120 hours under the protection of argon to produce amorphous MoS with an average particle size of 90 nm. 3 powder. Amorphous MoS made by mechanical alloying 3 The powder is cold-pressed into a target with a thickness of 6mm, and the metal Mo sheet is machined to make a Mo target. Multilayer Mo / IF-MoS prepared by magnetron sputtering and multi-arc ion plating with repeated cross sputtering 2 Composite coating. Firstly, a 30nm-thick metallic Mo layer was sputtered and deposited on the Ti alloy substrate by magnetron sputtering. The temperature on the Ti alloy substrate was maintained at 200°C, the sputtering bias was 150V, and the vacuum degree in the reaction chamber was 1.2×10 -3 Pa, Ar gas with a pressure of 1 Pa was introduced during the magnetron...
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