Method for treating semiconductor processing data
A technology for processing data and processing methods, applied in semiconductor/solid-state device manufacturing, comprehensive factory control, comprehensive factory control, etc., can solve problems such as large network load, large data redundancy, large amount of network transmission data, etc., to improve Effects of improving productivity and efficiency
Active Publication Date: 2008-12-17
BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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Problems solved by technology
[0010] For the current completely "passive" processing method, no matter what kind of process data, PMC and TMC will actively send it to CTC every certain time interval, which will inevitably cause a large amount of network transmission data and a large network load , the transmission rate is low, and the data redundancy is large
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[0028] The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention. Those of ordinary skill in the relevant technical field can also make various changes and modifications without departing from the spirit and scope of the present invention. Therefore All equivalent technical solutions also belong to the category of the present invention, and the scope of patent protection of the present invention should be defined by each claim.
[0029] In order to realize the data processing method of the present invention, a data request module is added in the CTC, and a request receiving module is respectively added in the PMC and the TMC, for the CTC to actively request data from the PMC and / or TMC, and the PMC and / or TMC to respond to the cluster device The controller requests to send data to it, and its functional structure is as follows image 3 shown.
[0030] The system sets different processing modes for rea...
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The invention provides a method for processing semiconductor processing data, including: 1) dividing the semiconductor processing data into two types: real-time recording data and state monitoring data. 2) During the process of processing, for real-time recording data, PMC and / or TMC actively send to CTC at regular time intervals, or CTC actively inquires PMC and / or TMC at regular intervals. 3) For the process data used for CTC to judge and adjust the work of the system, which only represents the instantaneous state of the equipment, that is, the state monitoring data, the CTC will query the PMC and / or TMC when necessary. For status monitoring data, when CTC does not request, PMC or TMC does not send these data information to CTC, the amount of data transmitted by the network is greatly reduced, thereby reducing the network transmission load and increasing the network transmission rate, to a large extent Improve the efficiency of semiconductor processing equipment to process data, thereby improving the productivity of the entire semiconductor processing and manufacturing.
Description
technical field [0001] The invention relates to a semiconductor processing method, in particular to a processing method for semiconductor cluster equipment processing data. Background technique [0002] The definition of Cluster Tool in the semiconductor standard (SEMI) is: an integrated manufacturing system that is physically connected together and can be used to process different process modules and transmission modules. Each process module and transmission module is controlled by a corresponding controller, and these module controllers are connected into an organic whole through an interface module. [0003] The semiconductor cluster equipment control software system includes three modules: cluster equipment controller (CTC, Cluster Tool Controller), process module controller (PMC, ProcessModule Controller), transmission module controller (TMC, Transport ModuleController), one of the three modules They are connected together through corresponding interface modules. Its ...
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IPC IPC(8): H04L29/06G05B19/418G05B23/00H01L21/00
CPCY02P90/02
Inventor 赵昂
Owner BEIJING NAURA MICROELECTRONICS EQUIP CO LTD