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Light sensing element and producing method thereof

A technology of optical sensing element and optical conversion element, which is applied in the manufacture of electrical components, semiconductor devices, final products, etc., can solve problems such as large applied voltage, and achieve the effects of simplifying the manufacturing process, reducing refraction loss, and reducing costs

Inactive Publication Date: 2009-01-21
IND TECH RES INST
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0010] Another object of the present invention is to replace Al with the existing light sensing element made of silicon material x Ga 1-x N series materials, solve Al x Ga 1-x N-series materials require too much applied voltage and are not suitable for use in portable electronic devices such as watches, mobile phones, PDAs, etc.

Method used

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  • Light sensing element and producing method thereof
  • Light sensing element and producing method thereof
  • Light sensing element and producing method thereof

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Embodiment

[0020] Figure 1A to Figure 1C It is to explain the manufacturing method of the photosensitive element of the present invention.

[0021] Such as Figure 1A As shown, a light conversion element is produced on a silicon substrate 100, and the light conversion element can be a metal-semiconductor-metal, a P-I-N diode, a P-N junction diode, a photo-conductor, a photo-transistor, a Schott Components such as Schottky barrier detectors that can convert optical signals into electrical signals. In this embodiment, as shown in the figure, the light conversion element 110 is a metal-semiconductor-metal, and in order to match the incident depth of light in different wavelength bands, the light conversion element 110 can be made into multiple shapes as shown in the figure. metal-semiconductor-metal in a concave portion to detect light incident at a deeper depth. However, the light conversion element of the present invention is not limited to the light conversion element of the above-men...

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Abstract

This invention discloses a light-sensing element and its manufacturing method including the following steps: preparing a light conversion element on a base plate, forming an anti-reflection coat on the conversion element and forming a fluorescent substance on the anti-reflection coat absorbing light of specific wave bands and reflecting light of the wave band easily sensed by the light conversion element, in which, this invented sensing element can monitor state of ultraviolet timely to further apply suitable protection measures, besides, this invention applies light sensing elements of low cost made of Si material to replace sapphire base board and AlxGal-xN series materials.

Description

technical field [0001] The present invention relates to a light-sensing element and its manufacturing method, in particular to a light-sensing element made of silicon material and its manufacturing method. Background technique [0002] The vigorous development of global industry in recent years has caused serious damage to the global environment. And because the ozone layer in the atmosphere is constantly being destroyed, the ultraviolet light in the sunlight cannot be effectively absorbed by the ozone layer, so that the intensity of ultraviolet light reaching the earth's surface increases rapidly, which has a huge impact on human health. Relevant medical research has also confirmed that ultraviolet light can cause skin cancer, cataracts and other eye diseases and immune system damage. Experiments show that ultraviolet light can be divided into ultraviolet light A (UV-A: 380 to 420 nanometers), ultraviolet light B (UV-B: 320 to 380 nanometers) and ultraviolet light C (UV-C:...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L31/18H01L31/08H01L31/028H01L31/0232H01L27/146
CPCY02P70/50
Inventor 林哲歆王庆钧李隆盛
Owner IND TECH RES INST