MEMS stretching twisted fatigue feature testing apparatus
An experimental device and fatigue characteristics technology, applied in the direction of measuring device, using stable torsion to test the strength of materials, instruments, etc., can solve the problems of difficult and impossible clamping and centering of micron-sized samples, and achieve easy access Real experimental data, easy processing, and easy-to-observe effects
Inactive Publication Date: 2009-06-10
BEIJING UNIV OF TECH
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However, this method is not suitable for the study of MEMS fatigue characteristics. First, the driving methods of hydraulic pressure and electromagnetic force are not suitable for the state of micron size. impossible to complete
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[0030] Attached below Figure 1-5 Specific embodiments of the present invention are illustrated:
[0031] The main functions of this embodiment are realized by comb capacitors and parallel plate capacitors. According to the different roles played during the experiment, these two capacitors are divided into drivers and sensors. where the drivers include: comb capacitor drivers such asfigure 1 2, 9, and parallel-plate capacitive drivers in the figure 1 4, 13 in. Sensors include: Comb capacitive sensors such as figure 1 5, 15 and parallel plate capacitive sensors such as figure 1 Middle 8.
[0032] Each comb capacitive driver and sensor consists of two sets of alternating comb teeth. One set of comb teeth is fixed, and the corresponding set of comb teeth is suspended. like figure 1 The fixed comb part of the comb capacitive driver 2,9 and the comb capacitive sensor 5,15 in Figure 4 402, 404 and 400, 406 in. Suspension comb part is image 3 302, 306 and 304, 308 in.
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The invention relates to MEMS drawing torsion fatigue characteristic experimental apparatus. It includes parallel plate capacitance driver and transducer, comb type capacitance driver and transducer, earthed electrode, drawing and torsion driving electrodes, drawing and torsion detecting electrodes. While in experiment, the drawing and torsion driving electrodes are respectively supplied alternating current signal to parallel plate and comb type capacitance drivers to make the fatigue testing specimen suffer alternating drawing and torsion stress at the same time. The parallel plate and comb type capacitance transducers are electrified direct current respectively by drawing and torsion detecting electrodes to detect fatigue testing specimen drawing and torsion amplitude. The invention has the advantages of easy processing, convenient operation, and high use value for MEMS structural strength study.
Description
technical field [0001] The invention relates to a MEMS tensile torsion fatigue characteristic experimental device, which is used for the research on the fatigue characteristics of MEMS (Micro-Electro-Mechanical System, Micro-Electro-Mechanical System) polysilicon structure in a multi-axial stress environment, and belongs to the field of basic research on the characteristics of micro-nano scale materials . Background technique [0002] Studies have found that silicon, which is a brittle material in the macroscopic state, will produce fatigue characteristics at the micro-nano scale, and the mechanism of this change is not yet clear. Understanding this mechanism and measuring the fatigue characteristic parameters of silicon at the micron scale are of great significance for the reliability design and life prediction of MEMS. [0003] At the current scale that MEMS can reach, many physical phenomena are very different from the macroscopic world due to the impact of size reductio...
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IPC IPC(8): G01N3/22G01N3/08G01M19/00G01M99/00
Inventor 尚德广贾冠华李立森王瑞杰孙国芹邓静刘豪
Owner BEIJING UNIV OF TECH