Encapsulation structure for high frequency integrated circuit and its making method
An integrated circuit and structural technology, applied in the direction of circuit, semiconductor/solid-state device manufacturing, electrical components, etc., can solve the problems of general products and methods without suitable structures and methods, unable to continue to use die bonder packaging process equipment, and high cost. To achieve the effects of simplified manufacturing process, light and thin products, and short electrical conduction paths
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[0090] Please refer to FIG. 2 , which is a schematic cross-sectional view of a high-frequency integrated circuit package structure according to the first embodiment of the present invention. A high-frequency integrated circuit packaging structure 200 in the first specific embodiment of the present invention mainly includes a flexible substrate 210, a chip 220, a plurality of raised bumps 230, a plurality of flattened bumps 240 and a plurality of 250 external terminals.
[0091] The flexible substrate 210 is a circuit film that can be repeatedly bent before packaging, such as a chip-on-film (COF) film, and the material of the core layer can be polyimide (polyimide, PI), poly The total thickness of polyethylene terephthalate (PET) and at least one metal circuit layer is less than 70 micrometers, which is less than one-tenth of the traditional BT substrate. The flexible substrate 210 has a first surface 211, a second surface 212 and a plurality of bump receiving holes 213, and i...
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