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Plane multiple joint robot

A planar multi-joint, robot technology, applied in the direction of manipulators, claw arms, manufacturing tools, etc., can solve the problems that the manipulator has no sealing device and the manipulator cannot be used in a high-clean environment, and achieves simple and reliable structure, improved rigidity, and good structural rigidity Effect

Active Publication Date: 2009-11-25
SHENYANG SIASUN ROBOT & AUTOMATION
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Obviously, manual and ordinary manipulators cannot be used in a high-clean environment at all, and manipulators in a clean environment do not have a sealing device for a vacuum environment
Therefore, there is a need for a small robot for handling semiconductor devices that can adapt to high vacuum and high cleanliness environments and meet the requirements of simple and compact structure, flexible and reliable movement, and high repeat positioning accuracy. However, there is no report on this small robot

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0047] Such as Picture 1-1 As shown, the planar multi-joint robot of the present invention is a handling robot with a symmetrical double-arm structure, which is composed of a column assembly 1 and a symmetrical double-arm assembly 2 to realize lifting, rotating and telescopic movements of the end effector.

[0048] Such as Figure 1-2 Shown, arms retracted to neutral position.

[0049] Such as Figure 1-3 Shown is the right arm in the maximally extended position.

[0050] Such as diagram 2-1 , 2-2 , 2-3, and 2-4, the structure of the column assembly 1 is composed of a lifting drive device, an inner shaft, an outer shaft rotation drive device, a linear guide, a linear seal and a rotary seal device, and an outer cover; wherein:

[0051] Lifting driving device comprises leading screw screw nut 16, leading screw support 17, lifting motor 18, lower fixed plate 20, screw nut connecting seat 23, and the lifting motor 18 that is fixed on the lower fixed plate 20 passes synchrono...

Embodiment 2

[0067] The telescopic arm assembly 2 given in Embodiment 1 belongs to the symmetrical double-arm structure with the same height as the end effector, and the arm structure of the telescopic arm assembly 2 given in this embodiment is a single-arm structure.

[0068] Such as Figure 3-1 As shown, specifically: including the first big arm 24, the second big arm 33, the second small arm 26, the third small arm 31, the first connection seat 27, the first end effector 28, the first big arm 24 is installed On the upper end of the outer shaft 5 in the linear guide, linear seal and rotary seal device, the second big arm 33 is installed on the upper end of the inner shaft 4 in the linear guide, linear seal and rotary seal device, the end of the first big arm 24 and the second The heads of the two small arms 26 are hinged, the end of the second big arm 33 is hinged with the head of the third small arm 31, the ends of the second small arm 26 and the third small arm 31 are hinged with the f...

Embodiment 3

[0071] The arm structure of the telescopic arm assembly 2 given in this embodiment is a double-arm structure in which the end effectors are unequal in height.

[0072] Such as Figure 5 As shown, specifically: it is composed of two sets of single-arm structural components given in Embodiment 2, and the two sets of single-arm structural components are arranged in an upper-lower stacked arrangement to form an upper-lower overlapping double-arm structure with unequal heights of end effectors.

[0073] Its working process is identical with embodiment 1.

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Abstract

The invention belongs to the mechanical body of an industrial robot, specifically a plane multi-joint robot, which is suitable for carrying objects in a high vacuum and high cleanliness environment. The invention includes a column assembly and an arm assembly. The column assembly includes the lifting drive device, the inner shaft, the outer shaft rotation drive device, the linear guide, the linear seal and the rotary sealing device, and the outer cover; the arm assembly includes the linkage mechanism, the end effector and its installation and adjustment mechanism; the arm assembly is installed on the column assembly one end. The invention has the characteristics of light weight, good dynamic control performance, high repeat positioning accuracy and the like.

Description

technical field [0001] The invention belongs to a mechanical body of an industrial robot, in particular to a plane multi-joint robot. Background technique [0002] With the continuous development of industries such as electronics, aerospace, military and biomedicine, modern industrial products and modern scientific experiment activities require miniaturization, precision, high purity, high quality and high reliability. In particular, the rapid development of the domestic semiconductor manufacturing industry requires semiconductor components to be processed in a relatively high cleanliness environment. The general pure clean environment can no longer meet the requirements of the latest semiconductor manufacturing technology, and only a high vacuum environment can meet it. In a high-vacuum environment, all dust particles no longer float in the space, but fall to the bottom of the space by their own gravity, and are sucked away when the space is vacuumed, thereby achieving a ve...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B25J1/00B25J18/04
Inventor 王凤利徐方李学威惠龙魏辉
Owner SHENYANG SIASUN ROBOT & AUTOMATION
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