Intelligent clothing based on MEMS and its making method

A technology of smart clothing and transducers, applied in the field of MEMS, can solve problems such as difficulty in ensuring reliability, limited functions, and limited number of electronic devices, and achieve the effects of improving reliability, increasing comfort, and expanding integration

Active Publication Date: 2007-07-18
HUAZHONG UNIV OF SCI & TECH
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Problems solved by technology

[0003] The above-mentioned various methods are easy to realize the integration of electronic devices and textiles, but their shortcomings are also obvious: first, in the process of use, with the continuous bending and folding of textiles, the reliability of interconnection between textiles and various electronic devices is very low. It is difficult to guarantee; secondly, in order not to affect the comfort of wearing textiles, the number of integrated electronic devices will be greatly limited, so its functions are extremely limited

Method used

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  • Intelligent clothing based on MEMS and its making method
  • Intelligent clothing based on MEMS and its making method
  • Intelligent clothing based on MEMS and its making method

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Embodiment Construction

[0019] Based on the MEMS / ICs technology, the present invention manufactures a flexible sensor array film that can be integrated with textiles on the wafer in three steps: first, the sensor for smart clothing is fabricated on the wafer; secondly, the first The sensors produced in the first step are arrayed and flexible to become a flexible sensor array film; finally, the flexible sensor array film produced in the second step is integrated with the textile.

[0020] The sensor on the smart clothing is an acoustic / electrical transducer that measures the heart sound signal of the human body. The sensor adopts a stacked multi-layer composite cantilever film structure, that is, a stacked cantilever beam bonded by elastic structural layers. The cantilever beam structure is bottom-up The upper layer is composed of a support layer, an adhesive layer, a bottom electrode, a piezoelectric film, an additional layer, and a top electrode. By applying sound pressure signals of different frequ...

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Abstract

An intelligent clothing based on MEMS technique for acquiring human physiological parameters including cardioelectric signals and cardiac sound features the integration of a flexible film containing sensor array with fabric. Its preparing process includes such steps as using MEMS technique to prepare sound/electricity transducers and electric interconnection on a wafer, etching to generate Si-island pattern on the back of wafer, coating polymer on both surfaces of wafer, photoetching to form sensor windows and sewing holes on a film, and integrating it with fabric by sewing.

Description

technical field [0001] The invention relates to the technical field of MEMS, in particular to a MEMS-based smart clothing for measuring human physiological parameters and a manufacturing method thereof. Background technique [0002] Since Einthoven applied the string-type galvanometer in 1903, the human body was traced to the electrocardiogram on the photosensitive film for the first time, the medical field has been devoted to collecting and recording various physiological parameters of the human body, so as to conduct more detailed and systematic evaluation and monitoring of the patient's condition. diagnosis. However, in most cases, specialized personnel are required to operate various complex and expensive equipment to examine patients, which brings a lot of unnecessary trouble to patients or medical institutions, and it is also difficult to achieve 24 hours a day Tracking and monitoring of patients' condition. Therefore, there is an urgent need for medical personnel to...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): A61B5/02A41D1/00
Inventor 刘胜张鸿海蒙茂洲徐涌甘志银
Owner HUAZHONG UNIV OF SCI & TECH
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