Differential type piezo-electric six-dimensional sensing unit
A six-dimensional force sensor and differential technology, which is applied in the field of sensors for measuring six-dimensional force in space, can solve the problems of difficult processing and miniaturization, and achieve the effects of good dynamic characteristics, light weight and high sensitivity
Inactive Publication Date: 2007-08-08
CHONGQING UNIV
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[0002] At present, the known six-dimensional force sensor widely adopts the method of pasting strain gauges on the complex elastic body to realize the measurement of the six-dimensional force signal. The processing of this type of six-dimensional force sensor requires high-precision processing equipment, which is difficult to process. In addition, due to the coupling phenomenon in all directions of this type of sensor, it is necessary to perform complex decoupling operations on the output signal to obtain the output result; in addition to using this method of attaching strain gauges to the elastic body, the patent CN00119096.2 Utilizes thick film technology, sinters thick film force sensitive resistors on the diaphragm, and realizes the measurement of six-dimensional force signals through decoupling. This method overcomes some shortcomings of the method of pasting strain gauges on elastic bodies , but since there are still coupling phenomena in all directions, it is still necessary to perform further decoupling operations on the output signal of the force sensitive resistor to obtain the output result
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[0024] Differential piezoelectric six-dimensional force sensor (refer to Figure 1). The sensor includes a sensor base with a signal output socket 3, four pairs of force-measuring groups installed opposite to each other in the relationship of the opposite faces of a cube in the sensor base, and pressed on the outer surfaces of the four pairs of force-measuring groups. Each pre-tightening spacer 7, withstands the force transmission frame 4 of four pairs of force measuring group inner sides respectively. Each of the force measurement groups has a measurement F that overlaps on the outside X , F Y of dynamometer 5 and overlapped on the inside one measuring F Z , M X , M Y , M Z The dynamometer 6 (refer to Figures 1, 6, 7). Each dynamometer 5 is equipped with eight X0°-cut piezoelectric wafers Xx located on the same plane in a center-symmetrical state (that is to say, the centers of these eight X0°-cut piezoelectric wafers Xx are along the circular ring. Arrangement), the se...
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It is a differential piezoelectric six-dimensional force sensor. The sensor includes four pairs force measuring groups which uses a cube relative surface relationship to pair installation, and the preload pan and transmission standing to press the four pairs force measuring groups. Each force measuring group has a force measuring element overlapping outside to measure FX and FY, and a force measuring displace measuring element overlapping inside to measure FZ, MX, MY, MZ. Inside each force measuring, with center symmetry state, it installs eight XOdegree chopped piezoelectric crystal in the same plane, whose sensitive axis perpendicular to their plane, and opposite to the sensitive axis direction of the piezoelectric crystal in the force measuring element; inside the force measuring displace measuring element, it installs eight YOdegree chopped piezoelectric crystal in the same plane, which parallel to the XOdegree chopped piezoelectric crystal in the same force measuring group, and their sensitive axis is parallel to their plane, and its sensitive axis has different direction. The invention needs no decoupling operation to the output signal, and it has reliable work, high measurement precision, and strong anti-interfere capability.
Description
technical field [0001] The invention relates to a sensor for measuring six-dimensional force in space. Background technique [0002] At present, the known six-dimensional force sensor widely adopts the method of pasting strain gauges on the complex elastic body to realize the measurement of the six-dimensional force signal. The processing of this type of six-dimensional force sensor requires high-precision processing equipment, which is difficult to process. In addition, due to the coupling phenomenon in all directions of this type of sensor, it is necessary to perform complex decoupling operations on the output signal to obtain the output result; in addition to using this method of attaching strain gauges to the elastic body, the patent CN00119096.2 Utilizes thick film technology, sinters thick film force sensitive resistors on the diaphragm, and realizes the measurement of six-dimensional force signals through decoupling. This method overcomes some shortcomings of the meth...
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IPC IPC(8): G01L1/16
Inventor 刘俊秦岚刘京诚李敏
Owner CHONGQING UNIV