Air floating upward components and manufacturing method thereof

Abstract

An air floating upward module and a process for manufacturing the air floating upward module comprise a structure for reducing the leakage of the compressed-air, can reduce the cost for processing and assembling, are used for cutting extruded sections (11) with hollow aluminum and the like into desired length (L) at the direction perpendicular to the compression direction (X) to form hollow plank stuffs (12). There is provided a box shaped structure wherein the cutting surfaces of the hollow plank stuffs (12) are clogged by air leaking caps (3, 4)Then, a jet part (4) and an air supplying port is shaped at the surface of the hollow plank stuffs.

Description

technical field [0001] The present invention relates to an air flotation module for non-contact transfer of substrates, and more particularly to an air flotation module and a method for manufacturing the air flotation module, which have a structure that reduces leakage of compressed air and can reduce processing and assembly costs. Background technique [0002] In a liquid crystal substrate transfer system, etc., an air flotation unit for non-contact transfer of glass substrates and the like is used. [0003] Fig. 3 is a diagram for explaining the air floating unit. The air floating unit shown in FIG. 3 has an air floating unit base 21, an air supply port 22 for supplying compressed air to the air floating unit, a hollow portion 24 serving as a flow path for distributing air, a throttle portion 26 for restricting the flow rate of air, The discharge part 25 which makes the air throttled by the throttle part 26 flow between the floated object 41 and the module. [0004] In a...

AI Technical Summary

Problems solved by technology

[0007] Second, in order to transfer the air to each ejection portion 25, the box-shaped utensil 31 needs to be a hollow structure, and because the box-shaped utensil 31 is a structure cut from a block material, the processing cost is high

[0008] Third, in order not to leak air from the contact surface of the box-shaped appliance 31 and the upper cover 32, it is necessary to fix the box-shaped appliance 31 and the upper cover 32 in close contact with many bolts, so the cost of assembly man-hours is high.

[0013] As mentioned above, in the structure of the conventional air floating unit, air is easy to leak from the contact surface between the opening of the box-shaped appliance and the cover. In addition, since the box-shaped appliance is a structure cut from a block-shaped part, processing high cost

In addition, in order to prevent air from leaking from the contact surface of the box-shaped appliance and the cover, many bolts are required to fix and maintain close contact, so there is a problem that the cost of assembly man-hours is high.

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