Symmetric difference induction structure
A dynamic inductive and symmetrical technology, applied in the field of symmetrical differential inductor structure, can solve the problems of increased power consumption, small inductive capacitance, and decreased Q value of differential inductors, so as to reduce power consumption and improve Q value. Effect
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[0025] FIG. 1 is a top view of a symmetrical differential inductor structure according to an embodiment of the invention. 2A and 2B are top views of the first spiral wire 106 and the second spiral wire 108, respectively. Fig. 3 is a cross-sectional view taken along the line A-A' in Fig. 1. Figure 4 is a top view of the gain wire.
[0026] Please refer to FIGS. 1, 2A, 2B, 3, and 4 at the same time. The symmetrical differential inductance structure 104 is disposed in the dielectric layer 102 on the substrate 100. The symmetrical differential inductance structure 104 can be processed by semiconductor technology. Implementation, therefore, the substrate 100 may be a silicon substrate. The symmetrical differential inductance structure 104 includes spiral wires 106 and 108. The material of the dielectric layer 102 is, for example, silicon oxide or other dielectric materials, and each wire may be made of copper, aluminum-copper alloy, or other materials.
[0027] The spiral wire 106 incl...
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