Femtosecond laser pulse produced microsize optical fiber Fabry-perot sensor and its production method

Abstract

The invention provides a minitype optical fiber FP sensor produced by fetosecond laser pulse, which is to produce a small cavity with rectangle cross section, and full penetration through fiber core on an ordinary single-mode optical fiber, and the depth of the small cavity satisfies: (D+d) / 2<=h<=D, wherein D is the diameter of the fiber, d is fiber core diameter. The invention also provides the production method of the invention. The sensor is superior in not only the special physical characteristic of miniaturization, integration, Convenience for production and reuse, strong harsh environment resistance capability, but also having negative temperature sensitivity and improving the sensitivity of axial load in a certain extent, and being applied in the optical sensing field in the future.

Description

technical field [0001] The invention belongs to the technical field of optical fiber sensing, and in particular relates to a device and a manufacturing method for manufacturing a miniature optical fiber F-P sensor by femtosecond laser pulses. Background technique [0002] In recent years, with the rapid development of biology, medicine, energy, environment, aerospace, military and other fields, people have become more and more interested in the miniaturization, light weight, low energy consumption, and resistance to harsh environments (high and low temperature, humidity, strong earthquakes, strong Shock, strong electromagnetic interference...) etc. have put forward very urgent requirements. Although the existing optical fiber sensors have the advantages of anti-electromagnetic interference, corrosion resistance, easy reusability, and large dynamic range of measurement, they are difficult to meet the needs of modern technology due to their complex manufacturing process, high ...

AI Technical Summary

Problems solved by technology

[0003] At present, research on micro-sensors based on micro-electromechanical systems (MEMS) is in the ascendant, and is gradually developing towards industrialization to upgrade existing sensors. Many scholars at home and abroad have proposed a variety of micro-electromechanical systems (MEMS)-based ) micro-sensors, such as micro-flow sensors, micro-acceleration sensors, micro-pressure sensors, micro-temperature and humidity sensors, micro-magnetic field sensors, micro-carbon dioxide gas sensors, microbial sensors, etc. based on MEMS technology, however, these sensors are based on electrical parameter measurement Principle, poor resistance to harsh environments, especially difficult to work in harsh environments such as high temperature, low temperature, flammable and explosive, strong electromagnetic interference, etc., and its system is complex, not easy to reuse, and cannot realize multi-parameter measurement, etc., which greatly limits The application of MEMS sensors in many important occasions

Therefore, only electrical microsensors represented by MEMS microsensors are difficult to meet the major needs of modern science and technology development and national economy and national defense.

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