Ion wind apparatus with no drifted balanced voltage
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- SHENZHEN KAIFA TECH
- Publication Date
- 2007-12-26
- Estimated Expiration
- Not applicable · inactive patent
Smart Images
Figure 1
Abstract
Description
technical field
[0001] The invention relates to a DC electrostatic ion blower, more specifically, relates to an ion blower for eliminating static charges existing in the production of electrostatic sensitive electronic components (such as computer hard disk magnetic heads, semiconductor devices, etc.) without offset in the balance voltage. Background technique
[0002] With the continuous development of semiconductor, especially hard disk magnetic head manufacturing technology, the requirements for electrostatic discharge (ESD) control in the production environment of magnetic heads and other products are getting higher and higher. For example, the Human Body Model (HBM) control specification has been raised from 15,000V more than 10 years ago to 15V now. As an important equipment for ESD control in the production environment, the electrostatic ion fan is required to continuously improve its performance to meet the ESD control requirements of the product. The working princi...