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Integrated metal-glass sealing method

A technology of glass sealing and metal, applied in the field of integrated metal-glass sealing, can solve the problems of unguaranteed product quality, complex process, poor product consistency, etc., achieve good production process, simple process operation, and reduce production cost Effect

Inactive Publication Date: 2008-02-06
UNIV OF SCI & TECH BEIJING +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The biggest problem with this traditional sealing method is that the process is complex, metals and alloys have experienced high temperatures many times, and the quality of the product cannot be guaranteed, and the consistency of the product is poor

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0011] Various parameters of Examples 1 to 7 of the present invention are shown in Table 1.

[0012] Table 1 Parameters in different embodiments

[0013] example 1

[0014] (Volume fraction%)

[0015] The present invention mainly adjusts the process parameters, which is described in Example 5. Clean the Kovar alloy chassis and lead wires to be sealed in acetone and alcohol, then dry them, and then mount them on graphite abrasive tools with borosilicate glass insulators (DM305), and then put them into wet N 2 in the furnace. The furnace was first raised to 700°C at a heating rate of 12°C / min, and held for 8 minutes; then raised to 920°C at a heating rate of 7°C / min, 2 dry N 2 Keep warm for 10 minutes; then cool down to 200°C at a rate of 6°C / min, and then cool to room temperature with the furnace. The sealing piece obtained in this way not only has a beautiful appearance, but also has good airtightness, less bubbles on the surface and inside of the g...

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PUM

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Abstract

The invention relates to an integrated metal-glass sealing method, which belongs to the metal-glass sealing field. The processing steps of the invention is that: a Kovar base plate and a lead-through to be sealed are cleaned in acetone and alcohol and then are dried; the dried Kovar base plate and lead-through are directly assembled with a hard borosilicate glass; the assembled product is first oxidized for 1-50 minutes in wet N2 under the temperature of 450-700 DEG C, then heated up at the speed of 5-15 DEG C per minute and heat preserved for 5-60 minutes under the weakly reducing atmosphere of 900-1050 DEG C, and finally cooled to 250-200 DEG C at the speed of 5-15 DEG C per minute. The invention has the advantages that the high temperature decarburizing gas outlet procedure in the traditional metal-glass sealing process is saved; the procedures of oxidation and sealing by fusing are integrated into a process to be completed; the integrated metal-glass sealing method can be used for the matched seal of the Kovar base plate with hard borosilicate glasses such as DM305, DM308, BH-G / K and Elan19; the airtightness of seals is good, the bonding strength of the seals is high and the product consistency is good; the operation is convenient, the production process can be better controlled, the production cost is lowered, and the production efficiency is improved.

Description

technical field [0001] The technology belongs to the technical field of metal and glass sealing, and in particular provides an integrated metal-glass sealing method. Background technique [0002] Metal and glass sealing are widely used in metal packaging, relays, connectors, solar vacuum heat collectors and other products that need to meet vacuum airtightness requirements. Among them, Kovar alloy and high-silicon boron hard glass are mostly used for matching sealing, but the glass and Kovar alloy do not infiltrate, but realize the hermetic sealing of Kovar alloy and glass through the infiltration and fusion of the oxide film on the surface and the glass. In actual production, the Kovar alloy is firstly decarburized and degassed in high-temperature wet hydrogen, and then the surface of the Kovar alloy is pre-oxidized. The process of achieving glass fusion sealing in an oxidizing atmosphere. The biggest problem with this traditional sealing method is that the process is comp...

Claims

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Application Information

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IPC IPC(8): C03C27/02
Inventor 罗大为沈卓身张瑜
Owner UNIV OF SCI & TECH BEIJING
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