Transverse shearing interferometer agglutination checking method
A technology of transverse shearing and detection method, which is applied in the field of gluing detection of transverse shearing interferometer, can solve the problem that the transverse shearing amount of transverse shearing interferometer is difficult to control accurately, and achieve convenient adjustment and calibration of optical path and ensure accuracy , Improve the effect of control accuracy
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[0039] The principle of the invention: the gas laser has the characteristics of high collimation and high monochromaticity. The laser output from the gas laser enters the transverse shearing interferometer after beam expansion, and quasi-monochromatic interference fringes with high contrast can be obtained. For the convenience of fringe reading, each interference fringe is collected with no less than 5 CCD pixels.
[0040] Suppose: the laser wavelength is λ, the focal length of the digital camera is f′, the CCD pixel size is d, and the number of interference fringes is N 0 , N 0 The number of CCD pixels occupied by each interference fringe is M 0 ;
[0041] Then the shear amount is calculated by the formula: Δ = f ′ M 0 · d · N 0 · λ , ...
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