High resolution micro-three-dimensional image forming apparatus
A three-dimensional imaging, high-resolution technology, used in microscopes, measuring devices, analysis materials, etc., can solve problems such as unrealized, achieve the effect of improving resolution, improving lighting efficiency, saving experimental costs and processing cycles
Active Publication Date: 2010-06-09
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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Problems solved by technology
The far-field super-resolution imaging technology adds a device to the traditional optical imaging system, the so-called metalens device, which can amplify the evanescent wave carrying the high-frequency information of the object and convert it into a propagating wave that can be observed in the far field. Realize high-resolution imaging of objects in the far field. This method is possible for imaging three-dimensional objects, but it has not yet been realized
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[0029] The present invention will be described in detail below in conjunction with specific embodiments and accompanying drawings, but the scope of protection of the present invention is not limited to the following examples, and should include all content in the claims.
[0030] (1) The wavelength of the incident light is selected as λ=632.8nm, the incident light has not undergone polarization processing and contains TM wave and TE wave;
[0031] (2) select the material of the hemispherical prism 6 to be K9 glass, and the radius is 20mm;
[0032] (3) Select slide glass 5 material to be K9 glass, its thickness is 1mm, adopts the gold of vacuum evaporation 10nm on its surface;
[0033] (4) Place the slide glass 5 coated with metal gold 4 on the hemispherical plane of the hemispherical prism 6, and place the measured object 3 on the metal surface on the slide glass 5, the measured object 3 is a line width of 160nm, Chromium lines with a period of 224nm;
[0034] (5) the incide...
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Abstract
The invention relates to a high resolution micrographic three-dimensional imaging device and the characters comprise the following steps: people firstly confirm a irradiating inlet light, then choosea proper hemisphere prism, choose a glass slide the surface of which is vapor deposited with a layer of metal on the hemisphere plane of the hemisphere prism, the objects are put on the metal layer soas to lead the irradiating inlet light to irradiate on a certain point on a prism hemisphere curved surface along the prism radius direction, the included angle of between the irradiating inlet lightand the glass slide plane is Theta; a beam of light generates complete reflection on the surface of the glass slide; a TM wave generates a surface plasma wave on the metal surface through the complete reflection; the TE wave is reflected; people put a Lambada / 4 wave and a reflector on the reflecting path out of the hemisphere prism; people put the detector on the upper part of the objects so as to proceed the detecting and record the detecting result; people proceed the irradiation and record the detected result at the different positions through changing the irradiating surface and the angleTheta and can obtain whole three-dimensional information of the detected objects through the comprehensive consideration of all the detecting results; the invention can effectively utilize the illuminance light and has flexible device and high resolution of the images.
Description
technical field [0001] The invention relates to a microscopic imaging device, in particular to a high-resolution microscopic three-dimensional imaging device. Background technique [0002] In recent years, with the rapid development of micro-nano processing technology and nanomaterials, the electromagnetic properties of micro-nano metal structures are receiving more and more attention. The interaction of light with surface micro-nano metal structures produces a series of new and exotic physical phenomena. For example, in 1998, French scientist Ebbesen and his collaborators discovered the phenomenon of extraordinary enhancement (Extraordinary Optical Transmission) of light passing through a subwavelength metal hole array. The research of H.J.Lezec et al. further showed that: when the light passes through the sub-wavelength metal nanohole, its transmittance can not only be enhanced, but also the diffraction angle of the beam is very small, and the transmission direction does ...
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IPC IPC(8): G02B21/36G02B21/00G01N21/00
Inventor 罗先刚杨学峰杜春雷史立芳
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI