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Diaphragm type optical fiber pressure sensor

A pressure sensor and diaphragm type technology, which is applied to fluid pressure measurement, instruments, and fluid pressure measurement using optical methods, can solve the problems of difficult adjustment of sensor sensitivity, uneven force on optical fiber, and sensitivity to temperature changes, etc., to achieve The process consistency is easy to guarantee, the process difficulty is reduced, and the repeatability is good.

Inactive Publication Date: 2010-09-15
INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The optical fiber pressure sensor produced in this way is greatly affected by the packaging process; the uneven glue layer will cause uneven force on the optical fiber, and it is easy to generate chirp; the sensitivity of the sensor is not easy to adjust, and it is more sensitive to temperature changes

Method used

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  • Diaphragm type optical fiber pressure sensor
  • Diaphragm type optical fiber pressure sensor
  • Diaphragm type optical fiber pressure sensor

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Embodiment Construction

[0031] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings.

[0032] like figure 1 as shown, figure 1 A schematic cross-sectional view of the membrane-type optical fiber pressure sensor provided by the present invention. The pressure sensor includes: a support cylinder 10, the support cylinder 10 is the main body of the optical fiber pressure sensor, the support cylinder 10 is a cylinder, and a circular hole 11 is opened on the coaxial part of the side wall at the lower end; a diaphragm 20, the The diaphragm 20 is located at the bottom of the support cylinder 10 to close the lower end of the support cylinder 10, the diaphragm 20 is fixed with a first boss 21 and a second boss 22; a fiber grating 40, the fiber grating 40 is fixed on the membrane On the top of the sheet 20, the pigt...

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Abstract

A diaphragm type optical fiber pressure sensor is characterized in that: the sensor comprises a support barrel, a diaphragm, an optical fiber grating, an end cap and a temperature compensation optical fiber grating, wherein, the support barrel is the body of the optical fiber pressure sensor and is cylindrical, a circular hole is arranged at a coaxial position on the lower side wall of the barrel; the diaphragm is arranged on the bottom of the support barrel to close the lower end of the support barrel; The optical fiber grating is fixed on the diaphragm, and tail fibers of the optical fiber grating pass through the circular hole on the side wall of the support barrel; the end cap covers the top of the support barrel; and the temperature compensation optical fiber grating is fixed under the end cap and tail fibers of the temperature compensation optical fiber grating pass through the circular hole on the side wall of the support barrel.

Description

technical field [0001] The invention relates to the technical field of optical fiber sensors, in particular to a diaphragm type optical fiber pressure sensor. Background technique [0002] Compared with the corresponding conventional sensors, optical fiber sensors have obvious advantages in terms of sensitivity, dynamic range, reliability, etc., especially in the fields of construction, petroleum, and military applications. [0003] The optical fiber pressure sensor is an instrument that detects the pressure of the surrounding environment by using the light transmission characteristics of the optical fiber and various modulation effects generated by its interaction with the surrounding environment. Compared with traditional pressure sensors, it has the following main advantages: high pressure sensitivity, no electromagnetic interference, light weight, high temperature resistance, compact structure, high reliability, and the advantages of both information sensing and optical ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01L1/24G01L19/00G01L11/02
Inventor 张文涛李芳刘育梁
Owner INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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