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Aluminum alloy antifriction layer flexible tin phase particles thinner PVD bushing magnetron sputtering technique

A technology of magnetron sputtering and aluminum alloy, which is applied in metal material coating process, sputtering coating, coating, etc., can solve the limitation of PVD bearing pad compliance or running-in performance and wear resistance, and cannot meet the requirements of PVD bearing pad operation Requirements and other issues to achieve the effect of improving compliance and running-in, improving wear resistance and reducing friction

Inactive Publication Date: 2008-07-09
CHONGQING YUEJIN MACHINERY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, the average diameter of soft tin phase particles dispersed in the aluminum alloy antifriction layer is relatively large (about 3um), and the compliance, running-in performance and wear resistance of PVD bearings during operation are limited to a certain extent, which cannot meet the requirements of current PVD bearings. running requirements

Method used

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  • Aluminum alloy antifriction layer flexible tin phase particles thinner PVD bushing magnetron sputtering technique
  • Aluminum alloy antifriction layer flexible tin phase particles thinner PVD bushing magnetron sputtering technique

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0018] As shown in Figure 1, Figure 2, and Figure 3, through the PVD bearing bush magnetron sputtering process of negative bias cleaning before sputtering the bearing bush in the sputtering cabin, the conventional method of producing PVD bearing bushes is first used outside the cabin through chemical degreasing and pickling , electrolytic degreasing, ultrasonic cleaning, processing tank, driving, oven, rectifier, control subsystem, etc. for pre-sputtering treatment, loading bearing bushes into the fixture in the magnetron sputtering cabin, vacuuming the magnetron sputtering cabin, and sputtering nickel Gate layer (Ni)4. Sputtering an aluminum alloy antifriction layer (AlSnCu) 6, the process conditions of the sputtering aluminum alloy antifriction layer 6: first prepare an aluminum alloy target material, and the weight percentage of pure tin in the aluminum alloy target material is 16% to 25% The weight percentage of pure copper is 0.3%~3%; the weight percentage of pure aluminu...

Embodiment 2

[0025] As shown in Figure 1, Figure 2, and Figure 3, the PVD bearing bush magnetron sputtering process through the negative bias cleaning of the bearing bush in the sputtering chamber before sputtering, the distance between the PVD bearing bush substrate and the aluminum alloy target is 120mm; The temperature in the aluminum alloy (AlSnCu) antifriction layer sputtering chamber is 98°C; the working gas argon partial pressure is within the range of 1.2Pa; the negative bias voltage of the PVD bearing substrate is -160V. All the other processes and equipment used are the same as in Example 1.

Embodiment 3

[0027] As shown in Figure 1, Figure 2, and Figure 3, the PVD bearing bush magnetron sputtering process through the negative bias cleaning of the bearing bush in the sputtering cabin before sputtering, the distance between the PVD bearing bush substrate and the aluminum alloy target is 90mm; The temperature in the aluminum alloy (AlSnCu) antifriction layer sputtering chamber is 70°C; the working gas argon partial pressure is within the range of 0.6Pa; the negative bias voltage of the PVD bearing substrate is -120V. All the other processes and equipment used are the same as in Example 1.

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Abstract

The invention discloses a PVD bearing magnetron sputtering process of an aluminum alloy friction reducing layer whose soft tin phase particles are finer, the process comprises treatment before sputtering, bearing loading fixture, vacuum pumping, Ni gate layer sputtering, AlSnCu friction reducing layer sputtering, testing size and shape and subsequent treatment. The keys are that the process conditions of sputtering the aluminum alloy friction reducing layer are that an aluminum alloy target is firstly prepared, the weight percentage of pure tin in the aluminum alloy target is 16-25 percent, the weight percent of pure copper is 0.3-3 percent, the weight percentage of pure aluminum is 83.7-72 percent, the distance of PVD bearing base and the aluminum alloy target is 60-120mm, the temperature of sputtering aluminum alloy friction reducing layer in a sputtering chamber is 40-98 DEG C, the partial pressure of argon which is work gas is between 0.1 Pa and 1.2 Pa, and the negative bias of the PVD bearing base which is galvanized is between -100 V and -160 V. The average diameter of the soft tin phase particles which are dispersed in the bearing aluminum alloy friction reducing layer which is produced by the invention is smaller than 2.5um, and the compliance and the running-in ability of the PVD bearing during running are improved.

Description

technical field [0001] The invention belongs to the production process of bearing bushes, and in particular relates to a PVD bearing bush magnetron sputtering process in which the average diameter of the soft tin phase particles in the aluminum alloy anti-friction layer is less than 2.5um. Background technique [0002] The bearing bush is a key moving part of the heart of a diesel engine, and it is also a basic part and a consumable part. [0003] As heart-moving parts, they are the key moving parts that determine the performance and reliability of diesel engines. [0004] As basic components, they play a very important role in supporting the diesel engine. [0005] Failure of the bearing pad in use will directly lead to serious consequences such as deformation or rupture of the main engine cylinder. [0006] Since the bearing bush is a consumable and is located at the heart, the diesel engine needs to be disassembled or partially disassembled when replacing it, which is l...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/35C23C14/16C23C14/54
Inventor 冀庆康周荣康吴文俊刘太贵
Owner CHONGQING YUEJIN MACHINERY