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Stamper and method of manufacturing the same

A technology of stamping and concave-convex surface, applied in stamping and its preparation field, can solve the problems of increased surface roughness and poor adhesion, and achieve the effect of small surface roughness

Inactive Publication Date: 2008-08-13
KK TOSHIBA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, in this method, the adhesion between the photoresist pattern and the Ni-V conductive film (V: 3-30%) is poor
Therefore, there is a possibility that the surface roughness (Ra) becomes large due to peeling during electroforming or wrinkling even if it does not peel off.

Method used

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Embodiment Construction

[0023] The present inventors found that by using Ni to which less than 3 atomic % of V (vanadium) was added as a conductive film for Ni electroforming, the adhesion between the conductive film and the photoresist was improved. In addition, it was found that if the adhesion between the conductive film and the photoresist is improved, the conductive film is less likely to peel off from the photoresist during electroforming, so the influence of stress generated at the beginning of electroforming can be avoided, and the non-drawing part can be reduced. (reflective part) surface roughness.

[0024] In addition, even if a large amount of photoresist is attached to the stamp after peeling off from the master, there is no problem. This is because the photoresist residue adhering to the stamper can be easily and completely removed in the subsequent photoresist residue removal step.

[0025] Embodiments of the present invention will be described below with reference to the drawings. I...

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Abstract

A stamper includes a stamper body including a nickel having a patterned surface by artificial drawing method, and a surface layer of a nickel-vanadium alloy having a vanadium content of less than 3 atomic percent formed on the patterned surface.

Description

technical field [0001] The present invention relates to a stamper used in injection molding and imprint techniques used in the manufacture of information recording media and a method for preparing the same. Background technique [0002] In recent years, as the recording density of information recording media has increased, patterns formed on the media have become finer. To mass-produce this information recording medium, the preparation method adopted is: prepare the original disk with graphics, copy the graphics of the original disk, form a metal stamp, and then copy the graphics of the stamp by injection molding or embossing. A media with the desired graphics is produced. [0003] In order to produce a stamp having such a fine pattern, a microfabrication technology for forming a concave-convex shape of about 100 nm or less is required. A typical stamp preparation method is a method using electron beam lithography (EB Lithography) and an electro...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G11B7/26B29D17/00G11B23/00
CPCC22C19/03C25D1/10C25D1/20
Inventor 杉村忍鎌田芳幸森田成二
Owner KK TOSHIBA