Material nanometer dynamic performance test two freedom degree loading unit

Abstract

The invention relates to a device used for testing material nanometer scale performance, particularly to a micro-loading device used for testing material nanometer scale mechanical performance. The device consists essentially of a base, an x axial direction motion mechanism, a pressure head, a driving component and a preloading mechanism, wherein, the pressure head is connected to the x axial direction motion mechanism by a plurality of flexible hinges which have thin walls; the x axial direction motion mechanism is connected to a rigid base by a plurality of flexible hinges which have thin walls; the driving component consists of piezoelectric stacks, one of the piezoelectric stack is wholly arranged between an x axial direction preloading mechanism and the x axial direction motion mechanism while the other piezoelectric stack is wholly arranged between the pressure head and the pressure head preloading mechanism, a rigid body used for holding the tested material is arranged at the lower part of the pressure head, and the rigid body is connected to the rigid base by the flexible hinge that is connected with the rigid body. In order to solve the problems that the loading force can not be tested by the prior art, or the testing accuracy is not high, the system structure is complicated and the cost is high, etc., the device of the invention has the advantages of simple and compact structure and low cost, etc.

Description

technical field [0001] The invention relates to the fields of material mechanical performance testing, ultra-precision processing equipment, micro-electro-mechanical systems, precision optical element processing, ultra-precision machining equipment, automobile manufacturing, aerospace nanoscience and biomedical engineering, and particularly relates to the mechanical properties of nanoscale materials And precision loading devices in mechanical behavior tests, especially involving in-situ (In Situ) loading devices in nanoscale material mechanical performance tests using scanning electron microscopes or transmission electron microscopes and other equipment. technical background [0002] In recent years, with the rapid development of microelectronics, biomedicine, semiconductors, optics, data storage, ultra-precision machinery and its manufacturing, people have put forward more and more research on the evaluation, testing methods and mechanical behavior of materials nanomechanica...

AI Technical Summary

Problems solved by technology

[0003] The object of the present invention is to provide a kind of material in order to solve the problems that the micro-loading device in the existing in-situ (In Situ) mechanical property testing system cannot detect the loading force or the detection accuracy is not high, the structure of the detection system is complicated, and the cost is expensive. Two-degree-of-freedom loading device in nanomechanical performance testing

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