Method for measuring flat inclination grating diffraction fringe

A technology of inclination angle and grating diffraction, which is applied in measurement devices, optical devices, instruments, etc., to achieve the effect of simple, easy-to-implement and cost-effective measurement equipment.

Inactive Publication Date: 2008-11-05
TIANJIN UNIVERSITY OF TECHNOLOGY
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Problems solved by technology

[0003] The object of the present invention is to solve the measurement problem of the three-dimensiona...

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  • Method for measuring flat inclination grating diffraction fringe
  • Method for measuring flat inclination grating diffraction fringe
  • Method for measuring flat inclination grating diffraction fringe

Examples

Experimental program
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Effect test

Embodiment 1

[0027] Measuring device for grating diffraction fringe method

[0028] Such as figure 1 As shown, the measuring device of the grating diffraction fringe method includes: a laser L, a polarizer P, a grating G, a CCD, a measured object W, and a computer C.

[0029] Measurement Experiment Results and Discussion

[0030] This test uses a helium-neon laser, a three-slit grating, and the measured object is a flat white board. According to the experimental device and test principle given above, the measured plane board actually rotates through the angles of 5, 10, 15, 20, 25, and 30 degrees. Measure the angle.

[0031] The fringe spacing x' and x can be obtained by measurement, and α can be calculated from the measured fringe spacing when the plane is perpendicular to the optical axis through the triangle geometric relationship in the light path diagram. In this experiment, the calculated approximate value of tanα is 0.33. Table 1 presents the measurement data, where the unit of ...

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Abstract

A grate diffract stripe measurement method of the plane elevation angle is provided. The measurement device includes a laser, a polaroid sheet, a grate, a CCD, a measured object, a computer. The invention uses the laser to generate the interference light source, which generates the diffract stripe image after passing through the diffract stripe, adjusts the position of the light source and the grate to generate the clear diffract stripe image on the object. The CCD is used to collect the diffract stripe image on the surface of the object, and transmit the collected image data to the computer, obtain the quantitative relation between the stripe mode change and the plane elevation angle theta through the corresponding computer software. The measurement device of the invention has convenient device, easy operation, fast measurement speed, non-contact measurement, which satisfies the presition requirement of the general geometric measurement. The measurement technology has practicality and high cost performance, higher practicality which can be widely used in the surface measurement of the industrial instrument, meanwhile is suitable is the three-dimensional measurement of the small scene and large scene.

Description

【Technical field】: [0001] The invention belongs to the technical field of object geometric quantity measurement, and in particular relates to the measurement of a plane inclination angle. 【Background technique】: [0002] Three-dimensional shape measurement (including the measurement of plane inclination angle) is the most difficult and also very important measurement technology in the field of measurement. Existing methods use almost all available measurement methods and media to obtain the three-dimensional shape of the measured object. Commonly used measurement methods utilize microwave technology, photoelectric technology, mechanical technology and sound technology, among others. Different technologies have their own advantages and disadvantages, and the optical three-dimensional shape measurement method is a non-contact measurement method. Compared with the contact mechanical measurement method, the optical measurement method not only has the simple measurement process ...

Claims

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Application Information

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IPC IPC(8): G01B11/26G01B11/24
Inventor 孙杰张智伶
Owner TIANJIN UNIVERSITY OF TECHNOLOGY
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